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Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation
Wang, Yue1; Shen, Yuan2; Zheng, Rin-Lin1; Shen, Jian-Ping1; Guo, Hai-Tao3; Liu, Chun-Xiao1
Department先进光电与生物材料研发中心
2018-09
Source PublicationRESULTS IN PHYSICS
ISSN2211-3797
Volume10Pages:200-204
Contribution Rank3
AbstractAn optical waveguide was fabricated by H+ ion implantation with an energy of 400 keV and a dose of 8x10(16) ions/cm(2) in the oxyfluoride glass for the first time to the best of our knowledge. The dark mode spectra of the waveguide were measured by a prism coupling method before and after the thermal treatment. The number of modes was reduced after annealing. The implantation process of 400 keV H+ ions into the oxyfluoride glass was simulated by using the SRIM 2013 program. The refractive index distribution of the ion-implanted waveguide was reconstructed by the reflection calculation method. The refractive index was decreased in the waveguide region and there was an optical barrier with a reduced refractive index at the end of the ion range. The proton-implanted oxyfluoride glass waveguide is a desirable alternative for the fabrication of a compact optical integrated device.
KeywordWaveguide Ion implantatIon Oxyfluoride Glasses
DOI10.1016/j.rinp.2018.06.001
Indexed BySCI
Language英语
WOS IDWOS:000443868900030
PublisherELSEVIER SCIENCE BV
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.opt.ac.cn/handle/181661/30639
Collection先进光电与生物材料研发中心
Corresponding AuthorLiu, Chun-Xiao
Affiliation1.Nanjing Univ Posts & Telecommun, Coll Elect & Optic Engn, Nanjing 210023, Jiangsu, Peoples R China
2.Hefei Normal Univ, Sch Elect & Informat Engn, Hefei 230601, Anhui, Peoples R China
3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Shaanxi, Peoples R China
Recommended Citation
GB/T 7714
Wang, Yue,Shen, Yuan,Zheng, Rin-Lin,et al. Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation[J]. RESULTS IN PHYSICS,2018,10:200-204.
APA Wang, Yue,Shen, Yuan,Zheng, Rin-Lin,Shen, Jian-Ping,Guo, Hai-Tao,&Liu, Chun-Xiao.(2018).Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation.RESULTS IN PHYSICS,10,200-204.
MLA Wang, Yue,et al."Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation".RESULTS IN PHYSICS 10(2018):200-204.
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