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Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation
Wang, Yue1; Shen, Yuan2; Zheng, Rin-Lin1; Shen, Jian-Ping1; Guo, Hai-Tao3; Liu, Chun-Xiao1
作者部门先进光电与生物材料研发中心
2018-09
发表期刊RESULTS IN PHYSICS
ISSN2211-3797
卷号10页码:200-204
产权排序3
摘要An optical waveguide was fabricated by H+ ion implantation with an energy of 400 keV and a dose of 8x10(16) ions/cm(2) in the oxyfluoride glass for the first time to the best of our knowledge. The dark mode spectra of the waveguide were measured by a prism coupling method before and after the thermal treatment. The number of modes was reduced after annealing. The implantation process of 400 keV H+ ions into the oxyfluoride glass was simulated by using the SRIM 2013 program. The refractive index distribution of the ion-implanted waveguide was reconstructed by the reflection calculation method. The refractive index was decreased in the waveguide region and there was an optical barrier with a reduced refractive index at the end of the ion range. The proton-implanted oxyfluoride glass waveguide is a desirable alternative for the fabrication of a compact optical integrated device.
关键词Waveguide Ion implantatIon Oxyfluoride Glasses
DOI10.1016/j.rinp.2018.06.001
收录类别SCI
语种英语
WOS记录号WOS:000443868900030
出版者ELSEVIER SCIENCE BV
引用统计
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/30639
专题先进光电与生物材料研发中心
通讯作者Liu, Chun-Xiao
作者单位1.Nanjing Univ Posts & Telecommun, Coll Elect & Optic Engn, Nanjing 210023, Jiangsu, Peoples R China
2.Hefei Normal Univ, Sch Elect & Informat Engn, Hefei 230601, Anhui, Peoples R China
3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Shaanxi, Peoples R China
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Wang, Yue,Shen, Yuan,Zheng, Rin-Lin,et al. Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation[J]. RESULTS IN PHYSICS,2018,10:200-204.
APA Wang, Yue,Shen, Yuan,Zheng, Rin-Lin,Shen, Jian-Ping,Guo, Hai-Tao,&Liu, Chun-Xiao.(2018).Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation.RESULTS IN PHYSICS,10,200-204.
MLA Wang, Yue,et al."Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation".RESULTS IN PHYSICS 10(2018):200-204.
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