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Influence mechanism of laser conditioning on the microcosmic properties of HfO_2 optical thin films
其他题名激光预处理对HfO_2光学薄膜微观性能的影响
Yang Lihong1; Xue Pengcheng1; Wang Tao2; Su Junhong1
作者部门检测技术研究中心
2018
发表期刊Journal of Optoelectronics·Laser
ISSN1005-0086
卷号29期号:2页码:187-196
产权排序2
摘要

n 1-on-1 case the influence of laser conditioning on the microscopic morphology and structure of HfO_2 optical thin film is studied. The HfO_2 thin films were irradiated with 10%,30%,50% and 70% of the threshold energy in 1-on-l. In order to research the microscopic morphology of HfO_2 optical thin film,the film surface areas of 10 m* 10 m and 3 m* 3 m were tested with atomic force microscope. Comparing laser conditioning with non-laser conditioning, the thin film being irradiated contains less impurities and its cone-shaped structure becomes smooth. The microscopic structure of thin film was tested with X-ray diffraction and X-ray photoelectron spectroscopy. Comparing laser conditioning with non-laser conditioning, the crystalline structure, the chemical bond and the element valence of thin film being irradiated are not changed. The components of thin film were tested with X-ray photoelectron spectroscopy. Comparing laser conditioning with non-laser conditioning,the thin film being irradiated contains less hafnium and more oxides of hafnium. The experimental results show that the laser conditioning plays an important role in polishing and oxidizing HfO_2 thin film.

关键词Hfo_2 Thin Film Polishing Laser Conditioning Oxidizing
收录类别CSCD
语种中文
WOS研究方向Physics
引用统计
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/30083
专题检测技术研究中心
作者单位1.Shool of Optoelectronics Engineering,Xi'an Technological University, Xi'an, Shaanxi 710021, China
2.Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences, Xi'an, Shaanxi 710119, China
推荐引用方式
GB/T 7714
Yang Lihong,Xue Pengcheng,Wang Tao,et al. Influence mechanism of laser conditioning on the microcosmic properties of HfO_2 optical thin films[J]. Journal of Optoelectronics·Laser,2018,29(2):187-196.
APA Yang Lihong,Xue Pengcheng,Wang Tao,&Su Junhong.(2018).Influence mechanism of laser conditioning on the microcosmic properties of HfO_2 optical thin films.Journal of Optoelectronics·Laser,29(2),187-196.
MLA Yang Lihong,et al."Influence mechanism of laser conditioning on the microcosmic properties of HfO_2 optical thin films".Journal of Optoelectronics·Laser 29.2(2018):187-196.
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