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Dwell time method based on Richardson-Lucy algorithm
Jiang, Bo1,2; Ma, Zhen1
Conference NameApplied Optics and Photonics China: Space Optics and Earth Imaging and Space Navigation, AOPC 2017
Source PublicationAOPC 2017: Space Optics and Earth Imaging and Space Navigation
Conference Date2017-06-04
Conference PlaceBeijing, China
Contribution Rank1

When the noise in the surface error data given by the interferometer has no effect on the iterative convergence of the RL algorithm, the RL algorithm for deconvolution in image restoration can be applied to the CCOS model to solve the dwell time. By extending the initial error function on the edge and denoising the noise in the surface error data given by the interferometer, it makes the result more available. The simulation results show the final residual error 10.7912nm nm in PV and 0.4305 nm in RMS, when the initial surface error is 107.2414 nm in PV and 15.1331 nm in RMS. The convergence rates of the PV and RMS values can reach up to 89.9% and 96.0%, respectively. The algorithms can satisfy the requirement of fabrication very well. © 2017 SPIE.

Indexed ByEI ; ISTP
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Document Type会议论文
Affiliation1.Xi'an Institute of Optics and Precision Mechanics, CAS, Xi'an; 710119, China
2.University of Chinese, Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Jiang, Bo,Ma, Zhen. Dwell time method based on Richardson-Lucy algorithm[C]:SPIE,2017.
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