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The Impact of Fabrication Errors of Double-layer BOE on Diffraction Efficiency
Ma Zebin1,2; Kang Fuzeng1; Wang Hao1,2; Ma, ZB (reprint author), Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian, Peoples R China.
2016
会议名称8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
会议录名称8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS; AND SMART STRUCTURES AND MATERIALS
卷号9685
会议日期2016-04-26
会议地点Suzhou, PEOPLES R CHINA
出版地BELLINGHAM
出版者SPIE-INT SOC OPTICAL ENGINEERING
产权排序1
摘要

With the development of optical technology, optical instruments become smaller and more integrated. Because of the high diffraction efficiency and light weight, binary optical elements become more and more popular. Binary optical element can only blaze at one wavelength, it has high diffraction efficiency at design wavelength. But the diffraction efficiency of binary optical elements will decrease quickly with the change of wavelength. And this situation will have big impact on image quality. Since double-layer BOE can blaze at two wavelengths, it has high diffraction efficiency at wide spectral bandwidth. There are kinds of fabrication errors. Based on scalar diffraction theory, this paper analyzes the diffraction efficiency of double-layer BOE with fabrication errors and simulates it in MATLAB. Simulation shows the diffraction efficiency decreases quickly if the depth errors of two layers are opposite, and this situation should avoid. As for periodic errors, tilt errors and angular errors, these fabrication errors have different impact of double-layer BOE on diffraction efficiency.

关键词Diffractive Optical Element Double-layer Boe Diffraction Efficiency
学科领域Optics
作者部门瞬态光学国家重点实验室
DOI10.1117/12.2242497
收录类别EI ; ISTP
ISBN号978-1-62841-920-7
语种英语
ISSN号0277-786X
引用统计
文献类型会议论文
条目标识符http://ir.opt.ac.cn/handle/181661/28461
专题瞬态光学研究室
通讯作者Ma, ZB (reprint author), Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian, Peoples R China.
作者单位1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian, Peoples R China
2.Univ Chinese Acad Sci, Beijing, Peoples R China
推荐引用方式
GB/T 7714
Ma Zebin,Kang Fuzeng,Wang Hao,et al. The Impact of Fabrication Errors of Double-layer BOE on Diffraction Efficiency[C]. BELLINGHAM:SPIE-INT SOC OPTICAL ENGINEERING,2016.
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