Fabrication of flexible grating sensing waveguide based on nano-imprint lithography and micro-replication process

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	Fabrication of flexible grating sensing waveguide based on nano-imprint lithography and micro-replication process
	Liu Yueming(刘雪明); Tian Weijian(田维坚); Zhang Shaojun
	2009
会议名称	4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
会议录名称	Proceedings of SPIE - The International Society for Optical Engineering
页码	728413
会议日期	2008-11-19
会议地点	Chengdu, China
出版地	P.O. Box 10, Bellingham WA, WA 98227-0010, United States
出版者	SPIE
会议主办者	The Chinese Optical Society (COS); CAS, The Institute of Optics and Electronics (IOE); State Key Laboratory of Optical Technology for Microfabrication; Sichuan Optical Society (SOS)
产权排序	2
学科领域	物理科学和化学
作者部门	瞬态光学国家重点实验室
收录类别	SCI ; EI
ISBN号	9780819475442
语种	中文
ISSN号	0277786X
文献类型	会议论文
条目标识符	http://ir.opt.ac.cn/handle/181661/11866
专题	瞬态光学研究室
推荐引用方式 GB/T 7714	Liu Yueming,Tian Weijian,Zhang Shaojun. Fabrication of flexible grating sensing waveguide based on nano-imprint lithography and micro-replication process[C]. P.O. Box 10, Bellingham WA, WA 98227-0010, United States:SPIE,2009:728413.