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''Carl Zeiss Stiftun 1 ''Thuringer Minister 1 11404389 1
11474352) 1 14.90 HWP 1 61274125) 1
61377008) 1 61475187 1 61575154 1
81427802 1 B714-07037) 1 Basic Research Plan 1
Federal Ministry of 1 Fundamental Research 1 Fundamental Research 1
General Program of S 1 JBG160502) 1 Key Laboratory of Op 1
Key Laboratory of Sp 1 National Key Scienti 1