Laser-guided anisotropic etching for precision machining of micro-engineered glass components | |
Li, Jun1; Zhong, Shuai1; Huang, Jiaxu1; Qiu, Pei1; Wang, Pu1,2; Li, Hui1; Qin, Chu3; Miao, Duo1; Xu, Shaolin1 | |
作者部门 | 先进光学仪器研究室 |
2024-05 | |
发表期刊 | International Journal of Machine Tools and Manufacture
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ISSN | 08906955 |
卷号 | 198 |
产权排序 | 2 |
摘要 | Micro-engineered glass components play a vital role in various domains, but their full potential remains untapped due to the lack of easily accessible high-precision machining methods for customizable microstructure. Our discovery of a new phenomenon, where laser-modified regions break the rule of inherently isotropic glass etching and regulate a directional anisotropic etching along modified tracks, has led to the development of a laser-guided anisotropic etching (LGAE) method. This method enables crafting precision glass microstructures with sharp features, smooth surfaces, and adjustable shapes and sizes. An ultrafast Bessel beam is utilized to create high aspect-ratio line-shaped modification within the glass. With a higher etching rate than pristine glass, the modified line guides directional anisotropic etching along the modified track, facilitating the formation of a V-shape with an angle altered by the etching ratio. These modified lines can further serve as basic building blocks to interconnect to construct a 3D internal modification region and then guide the glass's overall surface morphology etching evolution, enabling the creation of microstructures featuring designable shapes and adjustable feature sizes. To accurately predict and control the shape of the microstructures, we establish a finite difference etching model that incorporates localized etching rate regulation, validating the robustness and controllability of LGAE. This scalable method has successfully fabricated a 50 μm period micro-pyramid array with high uniformity over a centimeter-scale area, demonstrating its suitability for large-scale manufacturing. The showcased micro-engineered glass components encompass V-groove arrays for fiber alignment, blazed gratings for light modulation, and microchannels with customized trajectories for microfluidic chips. These advancements driven by LGAE can significantly contribute to the progress of glass-based research and industries. © 2024 Elsevier Ltd |
关键词 | Ultrafast laser Laser modification Wet etching Glass microstructures Large-scale fabrication |
DOI | 10.1016/j.ijmachtools.2024.104152 |
收录类别 | EI |
语种 | 英语 |
出版者 | Elsevier Ltd |
EI入藏号 | 20241515905919 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/97405 |
专题 | 先进光学仪器研究室 |
通讯作者 | Xu, Shaolin |
作者单位 | 1.Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen; 518055, China; 2.The Advanced Optical Instrument Research Department, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China; 3.School of Microelectronics, Southern University of Science and Technology, Shenzhen; 518055, China |
推荐引用方式 GB/T 7714 | Li, Jun,Zhong, Shuai,Huang, Jiaxu,et al. Laser-guided anisotropic etching for precision machining of micro-engineered glass components[J]. International Journal of Machine Tools and Manufacture,2024,198. |
APA | Li, Jun.,Zhong, Shuai.,Huang, Jiaxu.,Qiu, Pei.,Wang, Pu.,...&Xu, Shaolin.(2024).Laser-guided anisotropic etching for precision machining of micro-engineered glass components.International Journal of Machine Tools and Manufacture,198. |
MLA | Li, Jun,et al."Laser-guided anisotropic etching for precision machining of micro-engineered glass components".International Journal of Machine Tools and Manufacture 198(2024). |
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