Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation

doi:10.1016/j.optcom.2023.130115

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	Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation
	Li, Siyuan 1,2; Deng, Zhongxun 3; Quan, Naicheng 4; Zhang, Chunmin 5
作者部门	光谱成像技术研究室
	2024-02-01
发表期刊	Optics Communications
ISSN	00304018
卷号	552
产权排序	1
摘要	Theoretical and experimental demonstrations of a static spectroscopic ellipsometer are presented. It uses a linear polarizer for generating polarization states to interact with the sample, and three non-polarization beam splitters incorporating four achromatic quarter waveplate/linear analyzer pairs for analyzing the polarization states after the interaction. Compared to previous instruments, the most significant advantage of the described model is that it can obtain the spectral ellipsometric parameters with the same spectral resolution as the spectrometer in the system by a single snapshot. © 2023
关键词	Ellipsometer Polarization state Snapshot
DOI	10.1016/j.optcom.2023.130115
收录类别	EI
语种	英语
出版者	Elsevier B.V.
EI入藏号	20234515014937
引用统计
文献类型	期刊论文
条目标识符	http://ir.opt.ac.cn/handle/181661/96884
专题	光谱成像技术研究室
通讯作者	Quan, Naicheng
作者单位	1.Chinese Academy of Sciences, Xi'an Institute of Optics and Precision Mechanics, Key Laboratory of Spectral Imaging Technology CAS, Xi'an, China; 2.University of Chinese Academy of Sciences, Beijing, China; 3.Shenmu Vocational and Technical College, Shenmu, China; 4.School of Materials Science and Engineering, Xi'an University of Technology, Xi'an, China; 5.School of Science, Xi'an Jiaotong University, Xi'an, China
推荐引用方式 GB/T 7714	Li, Siyuan,Deng, Zhongxun,Quan, Naicheng,et al. Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation[J]. Optics Communications,2024,552.
APA	Li, Siyuan,Deng, Zhongxun,Quan, Naicheng,&Zhang, Chunmin.(2024).Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation.Optics Communications,552.
MLA	Li, Siyuan,et al."Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation".Optics Communications 552(2024).

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