中国科学院西安光学精密机械研究所机构知识库

Polishing plays an indispensable role in optical processing, especially for large-aperture optical reflective mirrors with freeform surfaces. Robotic polishing requires effective control of the contact force between the robot and the mirror during processing. In order to maintain a constant contact force during polishing, traditional polishing robots rely on closed-loop control of air cylinders, whose performances heavily rely on high-fidelity force sensing and real-time control. This paper proposes to employ a compliant constant-force mechanism in the end-effector of a polishing robot to passively maintain a constant force between the robot and the mirror, thus eliminating the requirement for force sensing and closed-loop control. The compliant constant force mechanism utilizing the second bending mode of fixed-guided compliant beams is adopted and elaborated for the passive end-effector. An end-effector providing a constant contact force of 40 N is designed and prototyped. The polishing experiment shows that the passive constant-force end-effector provides stable contact force between the robot and the mirror with fluctuation within 3.43 N, and achieves RMS (Root Mean Square) lower than lambda/10 (lambda = 632.8 nm) of the polished surface of the large-aperture optical reflective mirror. It is concluded that the constant-force compliant mechanism provides a low-cost and reliable solution for force control in robotic polishing.