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Investigation of an Influence Function Model as a Self-Rotating Wheel Polishing Tool and Its Application in High-Precision Optical Fabrication
Yao, Yongsheng1,2; Li, Qixin1; Ding, Jiaoteng1,2; Wang, Yongjie1; Ma, Zhen1; Fan, Xuewu1
作者部门先进光学元件试制中心
2022-04
发表期刊APPLIED SCIENCES-BASEL
ISSN2076-3417
卷号12期号:7
产权排序1
摘要

A new and patented polishing tool (ZL2020102387137) called a Self-rotating Wheel Polishing Tool (SWPT) was built, and its tool influence function (TIF) was investigated in this study. The polishing wheel is an innovative two-layer structure: a rigid hub inside and a flexible polishing pad outside. By using finite element analysis, the dynamic contact characteristics between the polishing wheel and the workpiece were studied, and the theoretical TIF was modeled. Due to the influence of friction resistance, the TIF is not circular, but oval. We then ran material removal experiment, and it was found that the experimental TIF and the theoretical TIF are very close and both are close to the Gaussian shape. Finally, optical fabrication was performed. After four times of about 3 h fabrication, the form error converged from PV-1.434 lambda (lambda = 632 nm), RMS-0.308 lambda to PV-0.144 lambda, RMS-0.009 lambda, and PV and RMS converged by 90% and 97%, respectively. The form accuracy achieved the expected target of RMS-0.02 lambda, which proves that the SWPT has the characteristics of high convergence rate and high fabrication accuracy. The SWPT has a broad application prospect in the field of high-precision optical fabrication.

关键词tool influence function wheel polishing tool optical fabrication high precision
DOI10.3390/app12073296
收录类别SCI
语种英语
WOS记录号WOS:000781846700001
出版者MDPI
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/95816
专题先进光学元件试制中心
通讯作者Yao, Yongsheng
作者单位1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Xian 710119, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式
GB/T 7714
Yao, Yongsheng,Li, Qixin,Ding, Jiaoteng,et al. Investigation of an Influence Function Model as a Self-Rotating Wheel Polishing Tool and Its Application in High-Precision Optical Fabrication[J]. APPLIED SCIENCES-BASEL,2022,12(7).
APA Yao, Yongsheng,Li, Qixin,Ding, Jiaoteng,Wang, Yongjie,Ma, Zhen,&Fan, Xuewu.(2022).Investigation of an Influence Function Model as a Self-Rotating Wheel Polishing Tool and Its Application in High-Precision Optical Fabrication.APPLIED SCIENCES-BASEL,12(7).
MLA Yao, Yongsheng,et al."Investigation of an Influence Function Model as a Self-Rotating Wheel Polishing Tool and Its Application in High-Precision Optical Fabrication".APPLIED SCIENCES-BASEL 12.7(2022).
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