| Resolution-enhanced phase retrieval for fringe reflection technology with structured light illumination | |
| Shen, Xianmeng1,2; Ren, Maoyun1,2; Ma, Suodong1,2,3; Xu, Shengzhi1,2; Liu, Mingrui1,2; Zheng, Lichen1,2 | |
| 2021 | |
| 会议名称 | Optical Metrology and Inspection for Industrial Applications VIII 2021 |
| 会议录名称 | Optical Metrology and Inspection for Industrial Applications VIII |
| 卷号 | 11899 |
| 会议日期 | 2021-10-10 |
| 会议地点 | Nantong, China |
| 出版者 | SPIE |
| 产权排序 | 3 |
| 摘要 | Owing to its advantages of simple system structure, large dynamic range and high measurement accuracy, fringe reflection technique (FRT) is becoming a powerful tool for specular free-form surface testing in the fields of reverse engineering, defect inspection, optical manufacturing, etc. However, due to the optical transfer function (OTF) of the FRT optical system, high-frequency information on the surface of an element under test is easily lost, which affects the high-precision acquisition of three-dimensional (3D) topography especially in microscopic measurement. Although the above problem can be suppressed to some extent by using or designing high-performance optical systems, the significant increase in the complexity and cost of the measurement system is sometimes unacceptable. To overcome the afore mentioned issue, a resolution-enhanced phase retrieval algorithm based on structured illumination microscopy (SIM) for FRT with an ordinary optical system is proposed in this paper. The combination of FRT and SIM is realized by projecting conventional phase-shifting fringe patterns in multiple directions. In principle, resolution-enhanced phase retrieval with super-diffraction limitation (up to twice the pass band of OTF) can be realized through spectrum extraction, stitching and shifting. A low cost, compact, coaxial FRT setup based on open-source hardware is designed and built for experimental verification. Simulations and experimental results demonstrate the effectiveness of the proposed technique. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only. |
| 关键词 | Specular free-form surface testing Fringe reflection technology Optical transfer function Resolutionenhanced phase retrieval Structured light illumination |
| 作者部门 | 光电跟踪与测量技术研究室 |
| DOI | 10.1117/12.2603764 |
| 收录类别 | EI |
| ISBN号 | 9781510646476 |
| 语种 | 英语 |
| ISSN号 | 0277786X;1996756X |
| EI入藏号 | 20215211394376 |
| 引用统计 | |
| 文献类型 | 会议论文 |
| 条目标识符 | http://ir.opt.ac.cn/handle/181661/95635 |
| 专题 | 光电跟踪与测量技术研究室 |
| 作者单位 | 1.Sch. of Optoelectron. Sci. and Eng. and Collab. Innov. Center of Suzhou Nano Science and Technology, Soochow University, Suzhou; 215006, China; 2.Key Lab of Adv. Optical Mfg. Technol. of Jiangsu Prov. and Key Lab of Mod. Optical Technol. of Educ. Min. of China, Soochow University, Suzhou; 215006, China; 3.CAS Key Laboratory of Space Precision Measurement Technology, Xi an; 710119, China |
| 推荐引用方式 GB/T 7714 | Shen, Xianmeng,Ren, Maoyun,Ma, Suodong,et al. Resolution-enhanced phase retrieval for fringe reflection technology with structured light illumination[C]:SPIE,2021. |
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| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| Resolution-enhanced （477KB） | 会议论文 | 限制开放 | CC BY-NC-SA | 请求全文 | ||
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