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Research on the properties of HfO2optical films prepared with APS assisted electron beam evaporation deposition
Pan, Yong-Gang; Liu, Zheng; Li, Mian; Liu, Wen-Cheng; Bai, Long; Zhang, Si-Bao; Luo, Chang-Xin; Zhang, Chun-Juan
2021
Conference NamePacific Rim Laser Damage 2021: Optical Materials for High-Power Lasers
Source PublicationPacific Rim Laser Damage 2021: Optical Materials for High-Power Lasers
Volume11912
Conference Date2021-05-23
Conference PlaceHangzhou, China
PublisherSPIE
Contribution Rank1
Abstract

HfO2 thin films are widely used in laser system because of its superior optical and mechanical properties, especially high laser induced damage threshold. In this paper, single-layer HfO2 thin films were prepared by APS plasma assisted electron beam evaporation deposition. The effects of oxygen charging of electron gun, baking temperature, discharge current of APS source and bias voltage of APS source on optical properties, surface roughness, standing wave electric filed and laser induced damage threshold of HfO2 thin films were studied by orthogonal experiment. Experiment and analysis results showed that the characteristics of HfO2 thin films are closely related to the oxygen charging of electron gun, baking temperature and APS assisted processing parameters. Especially, baking temperature, oxygen charging of electron gun and bias voltage of APS source have great influence on laser induced damage threshold. Through the analysis of experimental date, the optimal combination of process parameters for APS assisted electron beam evaporation of HfO2 optical films were obtained. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

Keywordthin film APS assisted deposition Laser damage threshold Orthogonal experiment
Department先进光学元件试制中心
Indexed ByEI
ISBN9781510646834
Language英语
ISSN0277786X;1996756X
EI Accession Number20213510845105
Document Type会议论文
Identifierhttp://ir.opt.ac.cn/handle/181661/95048
Collection先进光学元件试制中心
Corresponding AuthorPan, Yong-Gang
AffiliationXi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an, Shaanxi; 710119, China
Recommended Citation
GB/T 7714
Pan, Yong-Gang,Liu, Zheng,Li, Mian,et al. Research on the properties of HfO2optical films prepared with APS assisted electron beam evaporation deposition[C]:SPIE,2021.
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