Xi'an Institute of Optics and Precision Mechanics,CAS
Design and Fabrication of an Integrated Dual-Channel Thin-Film Filter for the Mid-Infrared | |
Zhou, Shun1; Zhang, Liyu1; Guo, Feng1; Wu, Chunfang1; Xu, Junqi1; Zhang, Kaifeng2; Li, Kun2; Liu, Zheng3; Xiao, Xiangguo4; Song, Shigeng5; Liu, Weiguo1 | |
作者部门 | 先进光学元件试制中心 |
2021-07 | |
发表期刊 | COATINGS
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ISSN | 2079-6412 |
卷号 | 11期号:7 |
产权排序 | 3 |
摘要 | Micro-filters fabricated using integration methods is now the trend for multichannel filters in imaging spectrum systems. Traditional multichannel bandpass filters are mainly fabricated separately by multilayered thin films and then glued together. This approach involves the complexity of precision cutting, dicing, and adhesive bonding; therefore, the possibility of miniaturization is quite limited. In this work, a dual channel bandpass thin film filter for the mid-infrared was fabricated by using the lift-off process. The structure of a 4-cavity Fabray-Perot (F-P) type filter was designed and optimized. The bandpass filter over the range 3.55-3.75 mu m with full width at half maximum (FWHM) of 274 nm and the bandpass filter over the range 4.85-4.95 mu m with FWHM of 246 nm were obtained with a 4.5 mu m joint width. The average transmittance of the filters is more than 83.5% and optical density value of the cutoff is 3. The thickness of 3.55-3.75 mu m bandpass filter was measured and the thickness error was analyzed. The results show that the thickness error, especially the thickness error of spacer layers, induces the degradations of peak transmission and bandwidth. This kind of mid-infrared filter has important application in space remote sensing, military, and civil fields. |
关键词 | optical thin film dual-channel band pass filter Fabray-Perot structure lift-off process |
DOI | 10.3390/coatings11070803 |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000676356500001 |
出版者 | MDPI |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/94980 |
专题 | 先进光学元件试制中心 |
通讯作者 | Zhou, Shun; Zhang, Kaifeng; Song, Shigeng |
作者单位 | 1.Xian Technol Univ, Thin Film & Opt Mfg Technol, Key Lab, Minist Educ, Xian 710032, Peoples R China 2.Lanzhou Inst Phys, Sci & Technol Vacuum Technol & Phys Lab, Lanzhou 730000, Peoples R China 3.Xian Inst Opt & Precis Mech CAS, Adv Mfg Dept, Xian 710119, Peoples R China 4.Xian Inst Appl Opt, Dept Electroopt Imaging Syst, Xian 710065, Peoples R China 5.Univ West Scotland, SUPA Scottish Univ Phys Alliance, Inst Thin Films Sensors & Imaging, Paisley G72 0LH, Renfrew, Scotland |
推荐引用方式 GB/T 7714 | Zhou, Shun,Zhang, Liyu,Guo, Feng,et al. Design and Fabrication of an Integrated Dual-Channel Thin-Film Filter for the Mid-Infrared[J]. COATINGS,2021,11(7). |
APA | Zhou, Shun.,Zhang, Liyu.,Guo, Feng.,Wu, Chunfang.,Xu, Junqi.,...&Liu, Weiguo.(2021).Design and Fabrication of an Integrated Dual-Channel Thin-Film Filter for the Mid-Infrared.COATINGS,11(7). |
MLA | Zhou, Shun,et al."Design and Fabrication of an Integrated Dual-Channel Thin-Film Filter for the Mid-Infrared".COATINGS 11.7(2021). |
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