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Secondary electron emission characteristics of the Al2O3/MgO double-layer structure prepared by atomic layer deposition
Cao, Weiwei1,2,3,4; Wang, Bo1; Yang, Yang1; Zhu, Bingli1,6; Guo, Junjiang2,4,5,6; Xu, Peng1,4,7; Bai, Xiaohong1,7; Qin, Junjun1,6; Wang, Chao1,6; Zhu, Jingping2,3; Bai, Yonglin1,6
作者部门空间科学微光探测技术研究室
2021-04-01
发表期刊CERAMICS INTERNATIONAL
ISSN0272-8842
卷号47期号:7页码:9866-9872
产权排序1
摘要

As a secondary electron emission layer, an Al2O3/MgO double-layer structure is fabricated by atomic layer deposition (ALD) technology. The thickness range from 1 nm to 4 nm of the top Al2O3 layer deposited on 20 nm MgO creates a double-layer. The morphology of the cross section, element distribution, surface roughness, X-ray diffraction, and secondary electron yield (SEY) values were measured by scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), atomic force microscopy (AFM) and secondary electron emission (SEE) measurement systems. The SEE characteristics of the MgO single layer, Al2O3 single layer and MgO/Al2O3 double-layer were measured. The maximum SEY of a single MgO layer reached 6.2@600 eV, and the maximum SEY of a single Al2O3 layer reached 3.92@400 eV. The SEY of the Al2O3/MgO double-layer decreased when the Al2O3 thickness ranged from 1 nm to 4 nm, and the SEY reduction value of the double-layer decreased as the Al2O3 thickness increased. Finally, Dionne's semiempirical SEE model was employed to explain the SEE yield of the prepared composite film structures. These results are useful for depositing a secondary electron emission layer in the channel of microchannel plates.

关键词Al2O3 film MgO film Secondary electron emission Atomic layer deposition Microchannel plate
DOI10.1016/j.ceramint.2020.12.128
收录类别SCI
语种英语
资助项目National Natural Science Foundation of China[61904202] ; National Natural Science Foundation of China[11803074] ; National Natural Science Foundation of China[11675258] ; Strategic Priority Research Program of Chinese Academy of Sciences[XDA17010203] ; Shaanxi Natural Science Basic Research Project[2018JM6059] ; Equipment Preresearch Field Fund[6140721010203]
WOS研究方向Materials Science
项目资助者National Natural Science Foundation of China ; Strategic Priority Research Program of Chinese Academy of Sciences ; Shaanxi Natural Science Basic Research Project ; Equipment Preresearch Field Fund
WOS类目Materials Science, Ceramics
WOS记录号WOS:000623673900006
出版者ELSEVIER SCI LTD
引用统计
被引频次:11[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/94645
专题空间科学微光探测技术研究室
通讯作者Bai, Yonglin
作者单位1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Key Lab Ultrafast Photoelect Diagnost Technol, Xian 710119, Peoples R China
2.Xi An Jiao Tong Univ, Key Lab Phys Elect & Devices, Minist Educ, Xian 710049, Peoples R China
3.Xi An Jiao Tong Univ, Shaanxi Key Lab Informat Photon Tech, Xian 710049, Peoples R China
4.Univ Chinese Acad Sci, Beijing 100091, Peoples R China
5.Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Shaanxi Key Lab Informat Photon Tech, Xian 710049, Peoples R China
6.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China
7.Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Shanxi, Peoples R China
推荐引用方式
GB/T 7714
Cao, Weiwei,Wang, Bo,Yang, Yang,et al. Secondary electron emission characteristics of the Al2O3/MgO double-layer structure prepared by atomic layer deposition[J]. CERAMICS INTERNATIONAL,2021,47(7):9866-9872.
APA Cao, Weiwei.,Wang, Bo.,Yang, Yang.,Zhu, Bingli.,Guo, Junjiang.,...&Bai, Yonglin.(2021).Secondary electron emission characteristics of the Al2O3/MgO double-layer structure prepared by atomic layer deposition.CERAMICS INTERNATIONAL,47(7),9866-9872.
MLA Cao, Weiwei,et al."Secondary electron emission characteristics of the Al2O3/MgO double-layer structure prepared by atomic layer deposition".CERAMICS INTERNATIONAL 47.7(2021):9866-9872.
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