Optimization of polishing wheel and investigation of its tool influence function | |
Yao, YongSheng1,2; Ma, Zhen1![]() ![]() ![]() | |
2020 | |
会议名称 | 2020 Applied Optics and Photonics China: Optics Ultra Precision Manufacturing and Testing, AOPC 2020 |
会议录名称 | AOPC 2020: Optics Ultra Precision Manufacturing and Testing |
卷号 | 11568 |
会议日期 | 2020-06-29 |
会议地点 | Shanghai, China |
出版者 | SPIE |
产权排序 | 1 |
摘要 | In this paper, a new type of wheel polishing tool is designed. Through the bevel gear structure, only one motor is used to realize the revolution and rotation of the polishing wheel, which makes the structure simple, small inertia, and stable operation. Traditional polishing wheels have a three-layer structure: Internal rigid hub, middle flexible rubber, and external polishing pad. It is found through experiments that the hardness of rubber has a greater influence on the tool influence function (TIF). Therefore, by optimizing the hardness of the rubber, we obtained a TIF very close to the Gaussian shape, which is conducive to the rapid convergence of the surface error. Finally, the effects of polishing wheel speed, polishing pressure and polishing time on the TIF, as well as the stability of the TIF, are studied through experiments. Experiments show that: (1) There is no linear relationship between the removal efficiency of the polishing wheel, the polishing wheel speed, and the polishing pressure, but as the parameter increases, the increase in the removal efficiency slows down; (2) There is a good linear relationship between the removal amount of the polishing wheel and time; (3) The TIF is very stable, and the stability of the TIF reaches 98%. © 2020 SPIE. All rights reserved. |
关键词 | optical polishing polishing wheel tool influence function |
作者部门 | 空间光学技术研究室 |
DOI | 10.1117/12.2579896 |
收录类别 | EI ; CPCI |
ISBN号 | 9781510639577 |
语种 | 英语 |
ISSN号 | 0277786X;1996756X |
WOS记录号 | WOS:000616198900044 |
EI入藏号 | 20204909580455 |
引用统计 | |
文献类型 | 会议论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/94434 |
专题 | 空间光学技术研究室 |
通讯作者 | Fan, XueWu |
作者单位 | 1.Xian Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
推荐引用方式 GB/T 7714 | Yao, YongSheng,Ma, Zhen,Dinga, JiaoTeng,et al. Optimization of polishing wheel and investigation of its tool influence function[C]:SPIE,2020. |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Optimization of poli(422KB) | 会议论文 | 限制开放 | CC BY-NC-SA | 请求全文 |
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