Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry

doi:10.1016/j.ijleo.2020.166165

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	Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry
	Li, Siyuan 1,2; Zhang, Chunmin 3; Quan, Naicheng 1,4
作者部门	光谱成像技术研究室
	2021-02
发表期刊	Optik
ISSN	00304026
卷号	228
产权排序	1
摘要	We propose a modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry. The proposed system employs only one high-order retarder and a Wollaston prism to analyze the changed state of polarization of the reflected light and can provide the maximum channel bandwidth of the channeled spectroscopic ellipsometry. The spectroscopic ellipsometric parameters of isotropic samples can be accurately measured in a measurement speed of 40 ms without mechanical or active modulation devices. The feasibility of the proposed spectroscopic ellipsometry is demonstrated by experiments. © 2020
关键词	Spectroscopic ellipsometry Optical frequency-domain interferometry Channel bandwidth
DOI	10.1016/j.ijleo.2020.166165
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000615935900011
出版者	Elsevier GmbH
EI入藏号	20210209744690
引用统计
文献类型	期刊论文
条目标识符	http://ir.opt.ac.cn/handle/181661/94244
专题	光谱成像技术研究室
通讯作者	Li, Siyuan
作者单位	1.Chinese Academy of Sciences, Xi'an Institute of Optics and Precision Mechanics, Key Laboratory of Spectral Imaging Technology CAS, Xi'an, China; 2.University of Chinese Academy of Sciences, Beijing, China; 3.Xi'an Jiaotong University, Xi'an, China; 4.School of Materials Science and Engineering, Xi'an University of Technology, Xi'an, China
推荐引用方式 GB/T 7714	Li, Siyuan,Zhang, Chunmin,Quan, Naicheng. Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry[J]. Optik,2021,228.
APA	Li, Siyuan,Zhang, Chunmin,&Quan, Naicheng.(2021).Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry.Optik,228.
MLA	Li, Siyuan,et al."Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry".Optik 228(2021).

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Modified snapshot sp（3801KB）	期刊论文	出版稿	限制开放	CC BY-NC-SA	请求全文