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Research on technology of measuring and correcting the optical axis deviation of high-order aspheric lens
Xihong, Fu; Shifa, Kang; Yu, Lei; Hua, Li; Peng, Wang; Nana, Ma; Qian, Dang
2020
会议名称2020 Applied Optics and Photonics China: Optics Ultra Precision Manufacturing and Testing, AOPC 2020
会议录名称AOPC 2020: Optics Ultra Precision Manufacturing and Testing
卷号11568
会议日期2020-06-29
会议地点Shanghai, China
出版者SPIE
产权排序1
摘要

On the basis of optical theory, the mathematical model of axisymmetric high-order aspherical curve and the curve characteristic parameters related to the locus of aspherical surface are summarized. The non-contact precise measurement and correction of the central deviation of axisymmetric high-order aspherical lens based on autocollimated centering principle and spectral confocal displacement sensing technology are introduced. The methods of measuring the center deviation of aspheric lens with concave and convex surfaces are given.The aspheric measuring device of Trioptics double optical path center deviation measuring instrument is used to measure the axisymmetric high-order aspheric lens,Through several measurements and modifications, the final results meet the requirements of the whole optical system for the optical axis deviation of the axisymmetric high-order aspheric lens.The technology of measuring and correcting the center deviation of high-order aspheric lens with axial symmetry introduced in the paper has high non-contact measuring accuracy, which can guide the adjustment amount and position direction of the coincidence of the axis of symmetry and the axis of mechanical rotation of aspheric lens. It can be widely used in the process of on-line processing, testing and systematic adjustment of aspheric lens and aspheric mirror with different apertures.While ensuring the accuracy of aspheric surface, it can improve the quality of finish grinding process, save a lot of time for polishing process, and play a guiding role in its processing and manufacturing process and high-precision system installation, so as to greatly improve the processing efficiency of axisymmetric high-order aspheric surface and the final optical system installation and adjustment accuracy. © 2020 SPIE. All rights reserved.

关键词High-order aspheric lens Axial symmetry Center deviation Noncontact measurement Correction process
作者部门装校技术研究中心
收录类别EI ; CPCI
ISBN号9781510639577
语种英语
ISSN号0277786X;1996756X
WOS记录号WOS:000616198900005
EI入藏号20204909580442
引用统计
文献类型会议论文
条目标识符http://ir.opt.ac.cn/handle/181661/94038
专题装校技术研究中心
作者单位Xi'an Institute of Optics and Precision Mechanics of Cas, Xi'an; 710119, China
推荐引用方式
GB/T 7714
Xihong, Fu,Shifa, Kang,Yu, Lei,et al. Research on technology of measuring and correcting the optical axis deviation of high-order aspheric lens[C]:SPIE,2020.
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