Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams | |
Chen, Tianqu1,2; Zhang, Guodong3; Wang, Yishan1; Li, Xuelong3; Stoian, Razvan4; Cheng, Guanghua3 | |
作者部门 | 瞬态光学研究室 |
2020-07 | |
发表期刊 | Micromachines |
ISSN | 2072666X |
卷号 | 11期号:7 |
产权排序 | 1 |
摘要 | Ultrafast non-diffractive Bessel laser beams provide strong light confinement and show robust advantages for fabricating high-aspect-ratio nanoscale structures inside transparent materials. They take the form of nanoscale voids with typical diameters well below the wavelength and aspect ratio of more than 1000. Delivering 3D morphologies of such nanoscale voids is an important issue to evaluate the result for fabrication. However, the characterization of such laser-induced structures is a difficult task. Here, an accurate and time-saving tomography-like methodology is proposed and adopted for reconstructing the morphology of high-aspect-ratio nano-holes. The technique allows an accurate assertion of laser parameters and position on nano-structured features. The reconstructed configuration reveals that nanoholes morphologies have a close relationship with energy distribution in the focal region. It suggests that the configuration of micro-explosion can be controlled by laser energy deposition in the process of laser-matter interaction down to the nanoscale. © 2020 by the authors. |
关键词 | bessel beam femtosecond laser picosecond laser fused silica micro-nano hole high-aspect-ratio tomography |
DOI | 10.3390/mi11070671 |
收录类别 | SCI ; EI |
语种 | 英语 |
WOS记录号 | WOS:000554205500001 |
出版者 | MDPI AG, Postfach, Basel, CH-4005, Switzerland |
EI入藏号 | 20203008975356 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/93614 |
专题 | 瞬态光学研究室 |
通讯作者 | Cheng, Guanghua |
作者单位 | 1.State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an; 710119, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China; 3.Electronic Information College and Center of Optical Imagery Analysis and Learning, Northwestern Polytechnical University, Xi'an; 710072, China; 4.Laboratoire Hubert Curien, UMR CNRS 5516, Université de Lyon, Université Jean Monnet, Saint Etienne; 42000, France |
推荐引用方式 GB/T 7714 | Chen, Tianqu,Zhang, Guodong,Wang, Yishan,et al. Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams[J]. Micromachines,2020,11(7). |
APA | Chen, Tianqu,Zhang, Guodong,Wang, Yishan,Li, Xuelong,Stoian, Razvan,&Cheng, Guanghua.(2020).Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams.Micromachines,11(7). |
MLA | Chen, Tianqu,et al."Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams".Micromachines 11.7(2020). |
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文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Reconstructing of em(2248KB) | 期刊论文 | 出版稿 | 限制开放 | CC BY-NC-SA | 请求全文 |
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