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Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams
Chen, Tianqu1,2; Zhang, Guodong3; Wang, Yishan1; Li, Xuelong3; Stoian, Razvan4; Cheng, Guanghua3
作者部门瞬态光学研究室
2020-07
发表期刊Micromachines
ISSN2072666X
卷号11期号:7
产权排序1
摘要

Ultrafast non-diffractive Bessel laser beams provide strong light confinement and show robust advantages for fabricating high-aspect-ratio nanoscale structures inside transparent materials. They take the form of nanoscale voids with typical diameters well below the wavelength and aspect ratio of more than 1000. Delivering 3D morphologies of such nanoscale voids is an important issue to evaluate the result for fabrication. However, the characterization of such laser-induced structures is a difficult task. Here, an accurate and time-saving tomography-like methodology is proposed and adopted for reconstructing the morphology of high-aspect-ratio nano-holes. The technique allows an accurate assertion of laser parameters and position on nano-structured features. The reconstructed configuration reveals that nanoholes morphologies have a close relationship with energy distribution in the focal region. It suggests that the configuration of micro-explosion can be controlled by laser energy deposition in the process of laser-matter interaction down to the nanoscale. © 2020 by the authors.

关键词bessel beam femtosecond laser picosecond laser fused silica micro-nano hole high-aspect-ratio tomography
DOI10.3390/mi11070671
收录类别SCI ; EI
语种英语
WOS记录号WOS:000554205500001
出版者MDPI AG, Postfach, Basel, CH-4005, Switzerland
EI入藏号20203008975356
引用统计
被引频次:11[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/93614
专题瞬态光学研究室
通讯作者Cheng, Guanghua
作者单位1.State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an; 710119, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China;
3.Electronic Information College and Center of Optical Imagery Analysis and Learning, Northwestern Polytechnical University, Xi'an; 710072, China;
4.Laboratoire Hubert Curien, UMR CNRS 5516, Université de Lyon, Université Jean Monnet, Saint Etienne; 42000, France
推荐引用方式
GB/T 7714
Chen, Tianqu,Zhang, Guodong,Wang, Yishan,et al. Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams[J]. Micromachines,2020,11(7).
APA Chen, Tianqu,Zhang, Guodong,Wang, Yishan,Li, Xuelong,Stoian, Razvan,&Cheng, Guanghua.(2020).Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams.Micromachines,11(7).
MLA Chen, Tianqu,et al."Reconstructing of embedded high-aspect-ratio nano-voids generated by ultrafast laser bessel beams".Micromachines 11.7(2020).
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