Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus

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	Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus
其他题名	Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus
	HARA,KEI; KAMINISHI,MORIMASA
	2017-08-16
专利权人	RICOH COMPANY, LTD.
公开日期	2017-08-16
授权国家	欧洲专利局
专利类型	授权发明
摘要	A vertical cavity surface emitting laser (VCSEL) includes a semiconductor substrate, a lower reflecting mirror formed thereon, an active layer formed on the lower reflecting mirror, a selective oxidization layer including a current confined structure, and an upper reflecting mirror. A mesa structure is formed in at least the active layer, selective oxidization layer, and the upper reflecting mirror. The VCSEL emits laser light perpendicularly to the plane of the semiconductor substrate when an electric current flows between an upper electrode and a lower electrode. The semiconductor substrate is inclined with respect to (100) plane, and the active layer includes a quantum well layer having a compressive strain with respect to the substrate, and a spacer layer. The spacer layer has either a compressive strain or a tensile strain with respect to the semiconductor substrate.
其他摘要	垂直腔表面发射激光器（VCSEL）包括半导体衬底，在其上形成的下反射镜，在下反射镜上形成的有源层，包括电流限制结构的选择性氧化层，以及上反射镜。台面结构至少形成在有源层，选择性氧化层和上部反射镜中。当电流在上电极和下电极之间流动时，VCSEL垂直于半导体衬底的平面发射激光。半导体衬底相对于（100）面倾斜，并且有源层包括相对于衬底具有压缩应变的量子阱层和间隔层。间隔层相对于半导体衬底具有压缩应变或拉伸应变。
申请日期	2009-05-29
专利号	EP2131458B1
专利状态	授权
申请号	EP2009251433
公开（公告）号	EP2131458B1
IPC 分类号	H01S5/183 \| B82Y20/00 \| H01S5/343 \| H01S5/42 \| H01S5/34 \| H01S5/32
专利代理人	-
代理机构	J A KEMP
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/93086
专题	半导体激光器专利数据库
作者单位	RICOH COMPANY, LTD.
推荐引用方式 GB/T 7714	HARA,KEI,KAMINISHI,MORIMASA. Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus. EP2131458B1[P]. 2017-08-16.