Surface emission laser and manufacturing method for surface emission laser, light reception element and manufacturing method for light reception element, and optical transceiver module

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	Surface emission laser and manufacturing method for surface emission laser, light reception element and manufacturing method for light reception element, and optical transceiver module
其他题名	Surface emission laser and manufacturing method for surface emission laser, light reception element and manufacturing method for light reception element, and optical transceiver module
	KANEKO, TAKEO
	2004-12-29
专利权人	SEIKO EPSON CORPORATION
公开日期	2004-12-29
授权国家	欧洲专利局
专利类型	发明申请
摘要	The object is to provide a surface emission laser, in which low-current drive is made possible, and a manufacturing method therefor, to provide a light reception element, in which high-speed modulation is made possible, and a manufacturing method therefor, and to provide an optical transceiver module in which optical connection efficiency is improved. An opening portion 5 from the other surface 1b side of the semiconductor substrate 1 to the end portion on the semiconductor substrate 1 side of the light emission portion 2A is formed on the semiconductor substrate 1 of the surface emission laser 100, and a lens 6 made of a transparent resin is formed through the use of the side surface of the opening portion 5. An opening portion 5 from the other surface 10b side of the semiconductor substrate 10 to the end portion on the semiconductor substrate 10 side of the light reception portion 20A is formed on the semiconductor substrate 10 of the photodiode 200, and a lens 6 made of a transparent resin is formed through the use of the side surface of the opening portion 5. The lens 6 formed on the light emission portion 2A of the aforementioned surface emission laser 100 and the lens 6 formed on the light reception portion 20A of the photodiode 200 are placed facing each other without an optical waveguide therebetween.
其他摘要	本发明的目的是提供一种表面发射激光器及其制造方法，其中可以实现低电流驱动，提供一种可以进行高速调制的光接收元件及其制造方法，以及提供一种光学收发器模块，其中光学连接效率得到改善。在表面发射激光器100的半导体衬底1上形成从半导体衬底1的另一表面1b侧到发光部分2A的半导体衬底1侧上的端部的开口部分5，以及制成的透镜6。通过使用开口部分5的侧表面形成透明树脂。从半导体衬底10的另一表面10b侧到光接收部分20A的半导体衬底10侧上的端部的开口部分5在光电二极管200的半导体衬底10上形成透明树脂，并且通过使用开口部分5的侧表面形成由透明树脂制成的透镜6.在上述表面的发光部分2A上形成透镜6发光激光器100和形成在光电二极管200的光接收部分20A上的透镜6彼此面对放置，其间没有光波导。
申请日期	2002-05-23
专利号	EP1263098A3
专利状态	失效
申请号	EP2002011381
公开（公告）号	EP1263098A3
IPC 分类号	H01L31/10 \| H01S5/00 \| H01S5/02 \| H01S5/026 \| H01S5/042 \| H01S5/18 \| H01S5/183 \| H01S5/42 \| H04B10/24 \| H01L31/12
专利代理人	-
代理机构	HOFFMANN, ECKART, DIPL.-ING.
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/88874
专题	半导体激光器专利数据库
作者单位	SEIKO EPSON CORPORATION
推荐引用方式 GB/T 7714	KANEKO, TAKEO. Surface emission laser and manufacturing method for surface emission laser, light reception element and manufacturing method for light reception element, and optical transceiver module. EP1263098A3[P]. 2004-12-29.

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