Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE

doi:10.1007/s11431-007-0035-z

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	Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE
	He YongNing ; Zhang JingWen ; Yang XiaoDong ; Xu QingAn ; Zhu ChangChun ; Hou Xun
作者部门	瞬态光学国家重点实验室
	2007-06-01
发表期刊	SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES
ISSN	1006-9321
卷号	50 期号:3 页码:290-301
摘要	ZnO, as a wide-band gap semiconductor, has recently become a new research focus in the field of ultraviolet optoelectronic semiconductors. Laser molecular beam epitaxy (L-MBE) is quite useful for the unit cell layer-by-layer epitaxial growth of zinc oxide thin films from the sintered ceramic target. The ZnO ceramic target with high purity was ablated by KrF laser pulses in an ultra high vacuum to deposit ZnO thin film during the process of L-MBE. It is found that the deposition rate of ZnO thin film by L-MBE is much lower than that by conventional pulsed laser deposition (PLD). Based on the experimental phenomena in the ZnO thin film growth process and the thermal-controlling mechanism of the nanosecond (ns) pulsed laser ablation of ZnO ceramic target, the suggested effective ablating time during the pulse duration can explain the very low deposition rate of the ZnO film by L-MBE. The unique dynamic mechanism for growing ZnO thin film is analyzed. Both the high energy of the deposition species and the low growth rate of the film are really beneficial for the L-MBE growth of the ZnO thin film with high crystallinity at low temperature.
文章类型	Article
关键词	Zno Thin Film L-mbe Dynamic Mechanism
学科领域	数理科学和化学
WOS标题词	Science & Technology ; Technology
DOI	10.1007/s11431-007-0035-z
收录类别	SCI ; EI
关键词[WOS]	ROOM-TEMPERATURE ; EMISSION
语种	英语
WOS研究方向	Engineering ; Materials Science
WOS类目	Engineering, Multidisciplinary ; Materials Science, Multidisciplinary
WOS记录号	WOS:000247830000004
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.opt.ac.cn/handle/181661/7226
专题	瞬态光学研究室
作者单位	1.Xian Jiaotong Univ, Dept Elect Sci & Technol, Sch Elect & Informat Engn, Xian 710049, Peoples R China 2.Acad Sinica, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt Technol, Xian 710068, Peoples R China
推荐引用方式 GB/T 7714	He YongNing,Zhang JingWen,Yang XiaoDong,et al. Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE[J]. SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,2007,50(3):290-301.
APA	He YongNing,Zhang JingWen,Yang XiaoDong,Xu QingAn,Zhu ChangChun,&Hou Xun.(2007).Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE.SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,50(3),290-301.
MLA	He YongNing,et al."Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE".SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES 50.3(2007):290-301.

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