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Strain quantum well type semiconductor laser
其他题名Strain quantum well type semiconductor laser
ISHIKAWA MAKOTO
1992-05-06
专利权人NEC CORP
公开日期1992-05-06
授权国家日本
专利类型发明申请
摘要PURPOSE:To make high-output operation possible and to raise the reliability by providing a laminated construction of a p-type AlxGa1-xAs clad layer having a mesa section, and by laminating a GaAs layer containing at least one of n-type dopants such as Si, Se, Sn, Te, etc., added by specified densities, on the p-type clad layer on both sides of the mesa section. CONSTITUTION:An n-AlxGa1-xAs clad layer 2, an active layer 3 of InGaAs/ AlGaAs-SCH structure, a p-AlxGa1-xAs clad layer 4, and a p-GaAs cap layer 5 are laminated successively on an n-GaAs board Next, a mesa having a width of 5mum is formed with SiO2 as a mask in the p-clad layer 4, and a high- density n-GaAs buried layer 6 is selectively formed in the sesa side section with Si and Se as dopants. The carrier density is made 5X10cm or more. The n-type GaAs buried layer 6 having a high density of 5X10cm or more in the sesa side section has an absorption loss for the light too having wavelengths longer than a band end wavelength of 0.86mum, because of a band tail effect by impurities. And the n-GaAs buried layer 6 operates as an absorbing medium even for the oscillated light of 0.9mum or more from an InGaAs strain quantum well layer 12.
其他摘要用途:通过提供具有台面截面的p型Al x Ga 1-x As包覆层的层叠结构,并通过层叠包含至少一种n型掺杂剂的GaAs层,使高输出操作成为可能并提高可靠性作为Si,Se,Sn,Te等,以规定的密度添加在台面部分两侧的p型覆层上。组成:n-AlxGa1-xAs包层2,InGaAs / AlGaAs-SCH结构的有源层3,p-AlxGa1-xAs包层4和p-GaAs帽层5依次层叠在n-GaAs上接下来,在p-覆层4中形成具有5μm宽度的台面,其中SiO2作为掩模,并且在sesa侧部分中选择性地形成高密度n + -GaAs掩埋层6。 Si和Se作为掺杂剂。载流子密度为5×10 18 cm -3或更高。在sesa侧部分中具有5×10 18 cm -3或更高密度的n型GaAs掩埋层6对于波长比波段末端波长为0.86μm的光具有吸收损耗,因为由杂质引起的带尾效应并且,即使对于来自InGaAs应变量子阱层12的0.9μm或更大的振荡光,n + -GaAs掩埋层6也用作吸收介质。
主权项-
申请日期1990-09-25
专利号JP1992132288A
专利状态失效
申请号JP1990254412
公开(公告)号JP1992132288A
IPC 分类号H01S5/00 | H01S3/18
专利代理人-
代理机构-
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/67515
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
ISHIKAWA MAKOTO. Strain quantum well type semiconductor laser. JP1992132288A[P]. 1992-05-06.
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