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Semiconductor laser diode and method of fabricating the same
其他题名Semiconductor laser diode and method of fabricating the same
KWAK, JOON-SEOP; CHOI, KWANG-KI; HA, KYOUNG-HO; KIM, YEON-HEE; SHIM, JONG-IN
2006-05-25
专利权人SAMSUNG ELECTRO_MECHANICS CO., LTD.
公开日期2006-05-25
授权国家美国
专利类型发明申请
摘要A semiconductor laser diode and a method of fabricating the same are provided. The semiconductor laser diode includes: a substrate; a predetermined compound semiconductor layer formed on the substrate; a lower cladding layer formed on the compound semiconductor layer; an active layer formed on the lower cladding layer; an upper cladding layer formed on the active layer and having a ridge formed in the middle thereof; trenches formed to a predetermined depth on at least one side of the ridge to penetrate the active layer from the upper cladding layer; a current blocking layer formed on surfaces of the upper cladding layer, except a top surface of the ridge, and inner walls of the trenches; a contact layer formed on the top surface of the ridge; and a first electrode formed on top surfaces of the contact layer and the current blocking layer.
其他摘要提供一种半导体激光二极管及其制造方法。半导体激光二极管包括:基板;形成在基板上的预定化合物半导体层;在化合物半导体层上形成下部包层;在下包层上形成有源层;上包层,形成在有源层上,并在其中间形成脊;在脊的至少一侧上形成预定深度的沟槽,以从上包层穿透有源层;除了脊的顶表面和沟槽的内壁之外,在上包层的表面上形成的电流阻挡层;接触层形成在脊的顶表面上;以及形成在接触层和电流阻挡层的顶表面上的第一电极。
主权项A semiconductor laser diode comprising: a substrate; a predetermined compound semiconductor layer formed on the substrate; a lower cladding layer formed on the compound semiconductor layer; an active layer formed on the lower cladding layer; an upper cladding layer formed on the active layer and having a ridge formed in the middle thereof; trenches formed to a predetermined depth on at least one side of the ridge to penetrate the active layer from the upper cladding layer; a current blocking layer formed on surfaces of the upper cladding layer, except a top surface of the ridge, and inner walls of the trenches; a contact layer formed on the top surface of the ridge; and a first electrode formed on top surfaces of the contact layer and the current blocking layer.
申请日期2005-09-09
专利号US20060109881A1
专利状态失效
申请号US11/221872
公开(公告)号US20060109881A1
IPC 分类号H01S5/00
专利代理人-
代理机构-
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/67439
专题半导体激光器专利数据库
作者单位SAMSUNG ELECTRO_MECHANICS CO., LTD.
推荐引用方式
GB/T 7714
KWAK, JOON-SEOP,CHOI, KWANG-KI,HA, KYOUNG-HO,et al. Semiconductor laser diode and method of fabricating the same. US20060109881A1[P]. 2006-05-25.
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