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Method and apparatus including movable-mirror MEMS-tuned surface-emitting lasers
其他题名Method and apparatus including movable-mirror MEMS-tuned surface-emitting lasers
DUMMER, MATTHEW M.; HOGAN, WILLIAM; HIBBS-BRENNER, MARY K.; JOHNSON, KLEIN L.
2014-03-06
专利权人VIXAR
公开日期2014-03-06
授权国家美国
专利类型发明申请
摘要VCSEL apparatus having a substrate, a solid-state gain medium, a reflective mirror on one side of the medium, a movable reflective mirror on an opposite side of the medium, and a mechanism configured to move the movable mirror to tune a characteristic wavelength. Also described is a VCSEL apparatus having a silicon substrate having a slot therethrough and electrical connections formed on a first face, a substrate having VCSELs thereon and mounted across the slot and electrically connected to the electrical connections on the silicon substrate, and a glass substrate affixed to a second face of the silicon substrate. Also described is a VCSEL apparatus having a graded-index lens array having GRIN lenses mounted adjacently in a staggered arrangement, a PCB mounted to the lens array, and VCSEL chips mounted adjacently on the PCB and arranged so as to emit laser light through the lenses.
其他摘要VCSEL设备具有基板,固态增益介质,介质一侧上的反射镜,介质相对侧上的可移动反射镜,以及配置成移动可移动镜以调谐特征波长的机构。还描述了一种VCSEL装置,其具有硅衬底,其具有穿过其中的槽和形成在第一面上的电连接,其上具有VCSEL并且安装在槽上并且电连接到硅衬底上的电连接的衬底,以及附着的玻璃衬底到硅衬底的第二面。还描述了一种VCSEL装置,其具有渐变折射率透镜阵列,其具有以交错排列相邻安装的GRIN透镜,安装到透镜阵列的PCB,以及相邻地安装在PCB上并且布置成通过透镜发射激光的VCSEL芯片。 。
主权项A VCSEL apparatus comprising: a substrate; a solid-state gain medium; a reflective mirror on one side of the solid-state gain medium; a movable reflective mirror on an opposite side of the solid-state gain medium; and a mechanism connected to the movable mirror and configured to move the mirror to tune a characteristic wavelength of the VCSEL apparatus.
申请日期2012-12-28
专利号US20140064315A1
专利状态授权
申请号US13/729166
公开(公告)号US20140064315A1
IPC 分类号H01S5/183
专利代理人-
代理机构-
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/65733
专题半导体激光器专利数据库
作者单位VIXAR
推荐引用方式
GB/T 7714
DUMMER, MATTHEW M.,HOGAN, WILLIAM,HIBBS-BRENNER, MARY K.,et al. Method and apparatus including movable-mirror MEMS-tuned surface-emitting lasers. US20140064315A1[P]. 2014-03-06.
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