Preparation of hybrid optical integrated circuit

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	Preparation of hybrid optical integrated circuit
其他题名	Preparation of hybrid optical integrated circuit
	MEGATA NAOYUKI; NAKAJIMA HIROKI
	1987-11-20
专利权人	FUJITSU LTD
公开日期	1987-11-20
授权国家	日本
专利类型	发明申请
摘要	PURPOSE:To conduct positioning and coupling easily with high precision by a method wherein an active optical element such as a semiconductor laser is positioned and bonded to a heat sink substrate, a mask for forming an optical guide is positioned to the active optical element and the optical guide is prepared. CONSTITUTION:An angle-shaped stepped section 15 is shaped to a positioning section for an active optical element through etching, etc., and the optical-guide forming side 91 is heightened and the active optical-element fitting side 92 is lowered in the stepped section. Two semiconductor laser chips LW, LR are butted, positioned and bonded to the two sides 15a, 15b of the angle-shaped stepped section, and a mask 16 is superposed and positioned onto a heat sink substrate 9. The pattern of the mask 16 is opened to a Y shape, and is formed so that branch sections 161, 162 branched to the Y shape and the two sides 15a, 15b of the angle-shaped stepped section make right angles. The Y-shaped pattern and the angle-shaped stepped section are formed so that the sum of the Y-shaped angle of aperture theta2 and the internal angle theta1 of the stepped section reaches 180 deg.. Accordingly, the active optical element and the optical guide can easily by positioned and coupled with high accuracy.
其他摘要	用途：通过将诸如半导体激光器的有源光学元件定位并结合到散热基板的方法，以高精度容易地进行定位和耦合，将用于形成光导的掩模定位到有源光学元件和准备好光导。组成：角形阶梯部分15通过蚀刻等成形为有源光学元件的定位部分，并且光学引导形成侧91被加高，并且有源光学元件配合侧92在阶梯中下降部分。两个半导体激光器芯片LW，LR对接，定位并结合到角形台阶部分的两个侧面15a，15b，并且掩模16叠置并定位在散热器基板9上。掩模16的图案是开口成Y形，并形成为分支成Y形的分支部分161,162和角形阶梯部分的两个侧面15a，15b成直角。形成Y形图案和角形阶梯部分，使得孔径θ2的Y形角度和阶梯部分的内角θ1之和达到180度。因此，有源光学元件和光学元件引导可以很容易地定位和耦合高精度。
主权项	-
申请日期	1986-05-16
专利号	JP1987268174A
专利状态	失效
申请号	JP1986111868
公开（公告）号	JP1987268174A
IPC 分类号	H01S5/00 \| H01S5/022 \| H01S3/18
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/63027
专题	半导体激光器专利数据库
作者单位	FUJITSU LTD
推荐引用方式 GB/T 7714	MEGATA NAOYUKI,NAKAJIMA HIROKI. Preparation of hybrid optical integrated circuit. JP1987268174A[P]. 1987-11-20.

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