Method of fabricating surface-emitting laser

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	Method of fabricating surface-emitting laser
其他题名	Method of fabricating surface-emitting laser
	KUBOTA, RYOSUKE
	2018-12-13
专利权人	SUMITOMO ELECTRIC INDUSTRIES, LTD.
公开日期	2018-12-13
授权国家	美国
专利类型	发明申请
摘要	A method of fabricating a surface-emitting laser includes the steps of fabricating a substrate product including device sections, a pad electrode, and a conductor, each of the device sections including a surface-emitting laser having an electrode, the conductor connecting the pad electrode to the electrode across a boundary of the device sections; attaching a connection device to the substrate product, the connection device including a probe device having a probe and a probe support base having an opening; performing a burn-in test of the surface-emitting lasers by applying electric power to the pad electrode through the probe at a high temperature; and after the burn-in test, separating the substrate product into semiconductor chips. The burn-in test includes a step of monitoring light emitted by the surface-emitting laser through the opening during the burn-in test, and a step of selecting the surface-emitting lasers based on a monitoring result.
其他摘要	制造表面发射激光器的方法包括制造包括器件部分，焊盘电极和导体的衬底产品的步骤，每个器件部分包括具有电极的表面发射激光器，该导体连接焊盘电极穿过器件部分边界的电极;将连接装置连接到基板产品，连接装置包括具有探针的探针装置和具有开口的探针支撑基座;通过在高温下通过探针向焊盘电极施加电能来执行表面发射激光器的老化测试;在老化测试之后，将衬底产品分离成半导体芯片。老化测试包括在老化测试期间通过开口监视由表面发射激光器发射的光的步骤，以及基于监视结果选择表面发射激光器的步骤。
主权项	A method of fabricating a surface-emitting laser, the method comprising the steps of: fabricating a substrate product having a first area and a second area provided at a side of the first area, the substrate product including a plurality of device sections provided in the first area, a pad electrode provided in the second area, and a conductor, each of the device sections including a surface-emitting laser having an electrode, the conductor connecting the pad electrode to the electrode of the surface-emitting laser across a boundary of the device sections; attaching a connection device to the substrate product, the connection device including a probe device, the probe device having a probe and a probe support base supporting the probe, the probe support base having an opening; performing a burn-in test of the surface-emitting lasers in the device sections by applying electric power to the pad electrode of the substrate product through the probe that is contacted to the pad electrode at a temperature higher than a room temperature; and after the burn-in test of the surface-emitting lasers, separating the substrate product into a plurality of semiconductor chips each of which includes one of the surface-emitting lasers, wherein the step of performing the burn-in test includes a step of monitoring light emitted by the surface-emitting laser in at least one of the device sections through the opening of the probe support base during the burn-in test so as to obtain a monitoring result, and a step of selecting the surface-emitting lasers based on the monitoring result.
申请日期	2018-03-23
专利号	US20180356459A1
专利状态	授权
申请号	US15/934359
公开（公告）号	US20180356459A1
IPC 分类号	G01R31/28 \| G01R31/27 \| H01S5/00
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/62702
专题	半导体激光器专利数据库
作者单位	SUMITOMO ELECTRIC INDUSTRIES, LTD.
推荐引用方式 GB/T 7714	KUBOTA, RYOSUKE. Method of fabricating surface-emitting laser. US20180356459A1[P]. 2018-12-13.