Birefringence measurement of polycrystalline silicon samples or the like

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	Birefringence measurement of polycrystalline silicon samples or the like
其他题名	Birefringence measurement of polycrystalline silicon samples or the like
	WANG, BAOLIANG
	2015-06-11
专利权人	HINDS INSTRUMENTS, INC.
公开日期	2015-06-11
授权国家	世界知识产权组织
专利类型	发明申请
摘要	A birefringence measurement system includes a lens mounted for selective movement into and out of use in the optical setup so that a wide range of sample types can be handled by the system without reconfiguring the primary components of the optical setup of the system (moving the detector, changing the light source power, etc.) in a manner that would sacrifice the cost effectiveness, efficiency, mechanical reliability and repeatability of measurements for such systems.
其他摘要	双折射测量系统包括安装的透镜，用于在光学装置中选择性地移入和移出使用，使得系统可以处理各种样品类型，而无需重新配置系统的光学装置的主要部件（移动检测器），以牺牲这种系统的成本效率，效率，机械可靠性和测量的可重复性的方式改变光源功率等。
主权项	A method of adapting a birefringence measurement system for measuring beam- spreading samples, wherein the system has an optical setup having primary components that include a light source for directing a source beam of light through a sample to propagate from the sample as a sampled beam of light, a detector module that includes an entrance aperture, a photoelastic modulator (PEM), and a detector that has active area for receiving the sampled beam of light for detecting the intensity thereof, the method comprising the steps of: placing a first sample in the path of the source beam of light, the sample being such that it does not spread the sampled beam of light; detecting light passing through the first sample for use in measuring the birefringence of the first sample; replacing the first sample with a second sample that spreads the sampled beam of light; focusing the spread, sampled beam of light to impinge upon the active area of the detector; and detecting the light impinging upon the active area for use in measuring the birefringence of the second sample.
申请日期	2014-11-23
专利号	WO2015084612A1
专利状态	未确认
申请号	PCT/US2014/066989
公开（公告）号	WO2015084612A1
IPC 分类号	G01J4/00
专利代理人	HUGHEY, PATRICK, W.
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/62555
专题	半导体激光器专利数据库
作者单位	HINDS INSTRUMENTS, INC.
推荐引用方式 GB/T 7714	WANG, BAOLIANG. Birefringence measurement of polycrystalline silicon samples or the like. WO2015084612A1[P]. 2015-06-11.