Light irradiation apparatus and drawing apparatus

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	Light irradiation apparatus and drawing apparatus
其他题名	Light irradiation apparatus and drawing apparatus
	FURUYA, YOSHIO; KOKUBO, MASAHIKO; KITAMURA, FUJIKAZU; SASADA, MASAKI
	2016-11-30
专利权人	SCREEN HOLDINGS CO., LTD.
公开日期	2016-11-30
授权国家	欧洲专利局
专利类型	发明申请
摘要	A light irradiation apparatus (31) includes a light source unit (40) and an irradiation optical system (5). In the light source unit, light source parts (4) arrayed in a plane emit laser light toward the irradiation optical system from different directions along the plane, and by the irradiation optical system, the laser light is guided along an optical axis (J1) to an irradiation plane (320). The irradiation optical system includes a division lens part (62), an optical path length difference generation part (61), and a condensing lens part (63). The division lens part includes element lenses (620) that divide light incident from the light source parts. The optical path length difference generation part includes transparent parts (610) having different optical path lengths from each other, and light that has passed through the element lenses respectively enters the transparent parts. The condensing lens part superimposes irradiation regions (50) of the light from the transparent parts on each other on the irradiation plane. Accordingly, the irradiation plane can be irradiated with high-intensity light having a uniform intensity distribution.
其他摘要	光照射装置（31）包括光源单元（40）和照射光学系统（5）。在该光源单元中，排列在平面上的光源部（4）从平面上的不同方向朝向照射光学系统发射激光，并且通过照射光学系统，激光沿着光轴（J1）到照射平面（320）。照射光学系统包括分割透镜部（62），光程差产生部（61）和聚光透镜部（63）。分割透镜部包括对从光源部入射的光进行分割的元件透镜（620）。光路长度差产生部包括彼此具有不同光路长度的透明部（610），并且已经通过元件透镜的光分别进入透明部。聚光透镜部分将来自透明部分的光的照射区域（50）彼此叠加在照射平面上。因此，可以用具有均匀强度分布的高强度光照射照射平面。
主权项	Alight irradiation apparatus (31, 31a) comprising: a light source unit (40) for emitting laser light toward a predetermined position; and an irradiation optical system (5, 5a) disposed at said predetermined position and for guiding the laser light emitted from said light source unit along an optical axis(J1) to an irradiation plane (320), said irradiation optical system including: a division lens part (62) including a plurality of lenses (620, 620a) arrayed in a direction that is perpendicular to said optical axis, and for dividing light incident from said light source unit by said plurality of lenses; an optical path length difference generation part (61) including a plurality of transparent parts (610) that are arrayed in a direction perpendicular to said optical axis and have different optical path lengths from each other, and in which light that has passed through said plurality of lenses is incident respectively on said plurality of transparent parts; and a condensing lens part (63) disposed closer to said irradiation plane on a path of said laser light than said optical path length difference generation part is, and for superimposing irradiation regions (50) of light from said plurality of transparent parts on each other on said irradiation plane, and characterinzed in that said light source unit includes a plurality of light source parts (4) arrayed in a plane, said plurality of light source parts emit laser light toward said predetermined position from different directions along said plane, and said plurality of lenses are arrayed in the direction that is along said plane.
申请日期	2015-05-29
专利号	EP3098017A1
专利状态	申请中
申请号	EP2015169831
公开（公告）号	EP3098017A1
IPC 分类号	B23K26/06 \| G03F7/20 \| G02B19/00 \| H01S5/40
专利代理人	-
代理机构	GODDAR, HEINZ J.
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/62020
专题	半导体激光器专利数据库
作者单位	SCREEN HOLDINGS CO., LTD.
推荐引用方式 GB/T 7714	FURUYA, YOSHIO,KOKUBO, MASAHIKO,KITAMURA, FUJIKAZU,et al. Light irradiation apparatus and drawing apparatus. EP3098017A1[P]. 2016-11-30.