Method and apparatus for monitoring port blockage for tdlas measurements in harsh environments

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	Method and apparatus for monitoring port blockage for tdlas measurements in harsh environments
其他题名	Method and apparatus for monitoring port blockage for tdlas measurements in harsh environments
	MASTERSON, BERNARD P.; ESTES, MICHAEL JOHN; SAPPEY, ANDREW D.
	2019-10-03
专利权人	JOHN ZINK COMPANY, LLC
公开日期	2019-10-03
授权国家	美国
专利类型	发明申请
摘要	A tunable diode laser absorption spectroscopy (TDLAS) optical head includes a housing configured for attachment to a sight tube attached to a wall of a process chamber. The TDLAS optical head further includes optics within the housing for transmitting, receiving, or transmitting and receiving a laser beam within a process chamber through the sight tube. The TDLAS optical head further includes a photo sensor in the housing positioned to receive light emitted by combustion within the process chamber to which the housing is attached.
其他摘要	可调谐二极管激光吸收光谱（TDLAS）光学头包括壳体，该壳体构造成用于附接到附接到处理室壁上的观察管。 TDLAS光学头还包括位于外壳内的光学器件，用于通过观察管在处理室内传输，接收或传输和接收激光束。 TDLAS光学头还包括位于壳体中的光电传感器，该光电传感器定位成接收由壳体附接到其上的处理室内的燃烧所发出的光。
主权项	A tunable diode laser absorption spectroscopy (TDLAS) optical head comprising: a housing configured for attachment to a sight tube attached to a wall of a process chamber; optics within the housing for transmitting, receiving, or transmitting and receiving a laser beam within a process chamber through the sight tube; and a photo sensor in the housing positioned to receive light emitted by combustion within the process chamber to which the housing is attached.
申请日期	2019-06-19
专利号	US20190301737A1
专利状态	申请中
申请号	US16/445748
公开（公告）号	US20190301737A1
IPC 分类号	F23N5/08 \| F23M11/04 \| G01N21/15 \| G01N21/39 \| G01N21/71 \| F23N5/24
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/59233
专题	半导体激光器专利数据库
作者单位	JOHN ZINK COMPANY, LLC
推荐引用方式 GB/T 7714	MASTERSON, BERNARD P.,ESTES, MICHAEL JOHN,SAPPEY, ANDREW D.. Method and apparatus for monitoring port blockage for tdlas measurements in harsh environments. US20190301737A1[P]. 2019-10-03.