Real-time trace gas sensor using a multi-mode diode laser and multiple line integrated cavity enhanced absorption spectroscopy

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	Real-time trace gas sensor using a multi-mode diode laser and multiple line integrated cavity enhanced absorption spectroscopy
其他题名	Real-time trace gas sensor using a multi-mode diode laser and multiple line integrated cavity enhanced absorption spectroscopy
	RAO, GOTTIPATY; KARPF, ANDREAS
	2017-12-14
专利权人	ADELPHI UNIVERSITY
公开日期	2017-12-14
授权国家	美国
专利类型	发明申请
摘要	A highly sensitive trace gas sensor based on a Fabry-Perot semiconductor laser and cavity enhanced absorption spectroscopy is designed to be capable of measuring sub-ppb concentrations of trace gases in real time. The broad frequency range of the multi-mode Fabry-Perot semiconductor laser spans a large number of absorption lines of the species of interest enabling multiple line integrated absorption spectroscopy which improves the sensitivity of detection. Additionally, the broad wavelength range of the laser excites a large number of cavity modes simultaneously, thereby reducing the sensor's susceptibility to vibration and thermal fluctuations making it suitable for field based monitoring applications. Using a high finesse optical cavity also enhances the sensitivity of the sensor by providing large path lengths, on the order of kilometers, in a small volume. Relatively high laser power is used to compensate for the low coupling efficiency of a broad linewidth laser to the optical cavity.
其他摘要	基于法布里 - 珀罗半导体激光器和腔增强吸收光谱的高灵敏度痕量气体传感器设计为能够实时测量亚ppb浓度的痕量气体。多模法布里 - 珀罗半导体激光器的宽频率范围跨越感兴趣物种的大量吸收线，使得多线集成吸收光谱能够提高检测灵敏度。此外，激光器的宽波长范围同时激发大量腔模，从而降低了传感器对振动和热波动的敏感性，使其适用于基于现场的监测应用。使用高精细光学腔还通过以小体积提供大约千米的大路径长度来增强传感器的灵敏度。相对高的激光功率用于补偿宽线宽激光器对光学腔的低耦合效率。
主权项	A method for detecting trace gases in a gas sample using cavity enhanced absorption spectroscopy, comprising the steps of: generating a continuous multi-mode laser beam with a Fabry-Perot semiconductor laser; passing said laser beam into a high finesse optical cavity cell in which the sample gas is located, whereby the laser beam bounces back and forth in the cavity cell a number of times and exits the cavity cell; and detecting integrated absorption in the laser beam exiting the cavity cell due to rovibronic and/or rovibrational transitions of the molecular species as it interacts with the laser beam bouncing in the cavity.
申请日期	2017-06-02
专利号	US20170356842A1
专利状态	失效
申请号	US15/612699
公开（公告）号	US20170356842A1
IPC 分类号	G01N21/17 \| G01N21/31 \| H01S5/40 \| G01N33/497
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/57591
专题	半导体激光器专利数据库
作者单位	ADELPHI UNIVERSITY
推荐引用方式 GB/T 7714	RAO, GOTTIPATY,KARPF, ANDREAS. Real-time trace gas sensor using a multi-mode diode laser and multiple line integrated cavity enhanced absorption spectroscopy. US20170356842A1[P]. 2017-12-14.