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Gas sensor using vcsel
其他题名Gas sensor using vcsel
GUDEMAN, CHRISTOPHER S.
2019-02-28
专利权人INNOVATIVE MICRO TECHNOLOGY
公开日期2019-02-28
授权国家美国
专利类型发明申请
摘要Systems and methods for forming a compact gas sensor include using a lithographically fabricated, reflective and lengthy gas channel formed in at least two substrate to make a relatively long gas channel. A VCSEL radiation source may be coupled to the channel and a photodiode detector to measure the transmitted light.
其他摘要用于形成紧凑型气体传感器的系统和方法包括使用在至少两个基板中形成的光刻制造的，反射的和冗长的气体通道来制造相对长的气体通道。 VCSEL辐射源可以耦合到通道和光电二极管检测器以测量透射光。
主权项A gas sensing device, comprising: at least one substrate with at least one cavity cavities formed lithographically therein, and with a reflective film coating sidewalls of the at least one cavity, and wherein the at least one cavity is configured for multiple passes of a ray of light within the cavity a sample gas filling the lithographically formed cavities; a radiation source coupled to the at least one substrate that launches radiation into the lithographically formed channels ; and a detector coupled to the at least one substrate, that detects radiation transmitting the lithographically formed cavities.
申请日期2018-08-20
专利号US20190064061A1
专利状态申请中
申请号US16/105693
公开（公告）号US20190064061A1
IPC 分类号G01N21/25 | H01S5/022 | H01S5/00 | H01S5/183 | G01N21/3504
专利代理人-
代理机构-
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/55042
专题半导体激光器专利数据库
作者单位INNOVATIVE MICRO TECHNOLOGY
推荐引用方式
GB/T 7714		 GUDEMAN, CHRISTOPHER S.. Gas sensor using vcsel. US20190064061A1[P]. 2019-02-28.
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