Optical Edge Coupling With A Separate Trimmed Taper

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	Optical Edge Coupling With A Separate Trimmed Taper
其他题名	Optical Edge Coupling With A Separate Trimmed Taper
	YANG, LI; PAN, HUAPU; BAI, YU SHENG; SHEN, XIAO ANDY
	2016-12-29
专利权人	FUTUREWEI TECHNOLOGIES, INC.
公开日期	2016-12-29
授权国家	美国
专利类型	发明申请
摘要	A method includes forming a first optical structure with an inverse taper and a separate optical structure on a semiconductor chip. The illustrative method also includes applying a protective structure over the optical structures and patterning the protective structure to expose the separate optical structure. The method further includes removing a portion of the separate optical structure to form a separate trimmed taper separate from, but adjacent to, the first optical structure. The protective structure is then removed from the first optical structure. Apparatuses are also disclosed.
其他摘要	一种方法包括在半导体芯片上形成具有倒锥形的第一光学结构和单独的光学结构。说明性方法还包括在光学结构上施加保护结构并图案化保护结构以暴露分离的光学结构。该方法还包括移除分离的光学结构的一部分以形成与第一光学结构分离但与第一光学结构相邻的单独的修整锥形。然后从第一光学结构去除保护结构。还公开了设备。
主权项	1 An apparatus comprising: an optical structure configured to pass light therethrough, the optical structure including an inverse taper defining an optical mode; and a separate trimmed taper spaced apart from, but adjacent to, the inverse taper of the optical structure, wherein the separate trimmed taper defines an optical mode, wherein the optical mode of the separate trimmed taper is larger than the optical mode of the inverse taper of the optical structure, and wherein the separate trimmed taper overlaps the inverse taper of the optical structure.
申请日期	2015-06-25
专利号	US20160377809A1
专利状态	失效
申请号	US14/750637
公开（公告）号	US20160377809A1
IPC 分类号	G02B6/14 \| G02B6/30 \| G02B6/136
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/54597
专题	半导体激光器专利数据库
作者单位	FUTUREWEI TECHNOLOGIES, INC.
推荐引用方式 GB/T 7714	YANG, LI,PAN, HUAPU,BAI, YU SHENG,et al. Optical Edge Coupling With A Separate Trimmed Taper. US20160377809A1[P]. 2016-12-29.