Tunable optical system with hybrid integrated laser

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	Tunable optical system with hybrid integrated laser
其他题名	Tunable optical system with hybrid integrated laser
	FENG, NINGNING; SUN, XIAOCHEN; ZHENG, DAWEI
	2014-03-20
专利权人	LAXENSE INC.
公开日期	2014-03-20
授权国家	美国
专利类型	发明申请
摘要	A tunable optical system with hybrid integrated semiconductor laser is provided. The optical system includes a silicon-on-insulator (SOI) substrate; a first optical waveguide tunable comb filter formed at the first side of the SOI substrate; a second optical waveguide tunable comb filter with detuned filter response formed at the first side of the SOI substrate; an etched laser pit at the first side of the SOI substrate; a plurality of spacers formed on the bottom surface of the laser pit near the plane of the first side of the SOI substrate; a plurality of bumping pads formed on the bottom surface of the laser pit near the plane of the first side of the SOI substrate; and a laser chip flip-chip bonded at the first side of the SOI substrate supported by the spacers. Heating sections may be provided on the filters to tune the filters.
其他摘要	提供了一种具有混合集成半导体激光器的可调谐光学系统。光学系统包括绝缘体上硅（SOI）衬底;第一光波导可调谐梳状滤波器，形成在SOI衬底的第一侧;第二光波导可调谐梳状滤波器，在SOI衬底的第一侧形成失谐滤波器响应;在SOI衬底的第一侧刻蚀激光坑;多个间隔物形成在靠近SOI衬底第一侧平面的激光坑底面上;多个凸点焊盘形成在靠近SOI衬底第一侧平面的激光坑底面上;激光器芯片倒装接合在由间隔物支撑的SOI衬底的第一侧。可以在过滤器上提供加热部分以调节过滤器。
主权项	A tunable optical system comprising: a silicon on insulator (SOI) substrate having a first side; a first waveguide based wavelength selective tunable filter formed on the first side of the SOI substrate; a second waveguide based wavelength selective tunable filter formed on the first side of the SOI substrate; an etched laser pit formed in the first side of the SOI substrate; and a laser chip flip-chip bonded onto the first side of the SOI substrate and received in the laser pit, the laser chip being optically coupled to the first and second waveguide based wavelength selective tunable filters.
申请日期	2012-09-14
专利号	US20140079082A1
专利状态	授权
申请号	US13/620410
公开（公告）号	US20140079082A1
IPC 分类号	H01S5/06 \| H01L33/48
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/54370
专题	半导体激光器专利数据库
作者单位	LAXENSE INC.
推荐引用方式 GB/T 7714	FENG, NINGNING,SUN, XIAOCHEN,ZHENG, DAWEI. Tunable optical system with hybrid integrated laser. US20140079082A1[P]. 2014-03-20.