Standoffs for passive alignment of semiconductor chip and coupling bench

OPT OpenIR > 半导体激光器专利数据库

	Standoffs for passive alignment of semiconductor chip and coupling bench
其他题名	Standoffs for passive alignment of semiconductor chip and coupling bench
	LIM, HWI; CHA CHER LIANG RANDALL; LAM, YEE; TEO KIAN HIN VICTOR; LIM HWI SIONG; LAM YEE LOY
	2003-12-31
专利权人	DENSELIGHT SEMICONDUCTORS PTE LTD
公开日期	2003-12-31
授权国家	世界知识产权组织
专利类型	发明申请
摘要	Disclosed is a method for forming a first optical device (128) and a vertical stand-off (126) on adjacent regions of a substrate. The method comprises the steps of: depositing subsequent layers of optical materials on the substrate and defining features of the optical device by masking and etching regions of at least one layer; defining the transverse extent of the stand-off by protectively masking a separate region of the or each layer that is etched; modifying the relative thickness of an upper section of the stand-off and the first optical device so that a second optical device (200) subsequently supported by the stand-off is in close optical alignment with the first optical device; and etching a trench through one or more layers of material between the vertical stand-off and the first optical device. Also disclosed is an optical assembly comprising a first optical device and at least one vertical stand-off formed on adjacent regions of a substrate.
其他摘要	公开了一种在基板的相邻区域上形成第一光学器件（128）和垂直支座（126）的方法。该方法包括以下步骤：在基板上沉积后续的光学材料层，并通过掩蔽和蚀刻至少一层的区域来限定光学器件的特征;通过保护性地掩蔽蚀刻的每层的单独区域来限定支座的横向范围;改变支座的上部和第一光学装置的相对厚度，使得随后由支座支撑的第二光学装置（200）与第一光学装置紧密光学对准;在垂直支座和第一光学装置之间通过一层或多层材料蚀刻沟槽。还公开了一种光学组件，包括第一光学器件和形成在基板的相邻区域上的至少一个垂直支座。
主权项	An optical assembly comprising a first optical device and at least one vertical stand-off formed on adjacent regions of a substrate, the or each vertical stand-off and a portion of the first optical device comprising a common planar multiple-layer structure, the relative thickness of an upper section of the first optical device and the or each vertical stand-off being such that a second separate optical device subsequently located on the or each stand- off is brought in close optical alignment with the first optical device.
申请日期	2002-11-25
专利号	WO2003048823A3
专利状态	未确认
申请号	PCT/GB2002/005296
公开（公告）号	WO2003048823A3
IPC 分类号	G02B6/42 \| G02B6/26 \| G02B6/136
专利代理人	GILL JENNINGS & EVERY, BROADGATE HOUSE, 7 ELDON STREET, LONDON EC2M 7LH, GB
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/52916
专题	半导体激光器专利数据库
作者单位	DENSELIGHT SEMICONDUCTORS PTE LTD
推荐引用方式 GB/T 7714	LIM, HWI,CHA CHER LIANG RANDALL,LAM, YEE,et al. Standoffs for passive alignment of semiconductor chip and coupling bench. WO2003048823A3[P]. 2003-12-31.

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
WO2003048823A3.PDF（193KB）	专利		开放获取	CC BY-NC-SA	请求全文