Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus

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	Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
其他题名	Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
	SHOUJI, HIROYOSHI; SATO, SHUNICHI; ISHII, TOSHIHIRO; MAKITA, KENGO; HAYASHI, MASAHIRO; SASAKI, TOSHIHIDE; ITOH, AKIHIRO
	2013-04-09
专利权人	RICOH COMPANY, LTD.
公开日期	2013-04-09
授权国家	美国
专利类型	授权发明
摘要	A manufacturing method for manufacturing a surface-emitting laser device includes the steps of forming a laminated body in which a lower reflecting mirror, a resonator structure including an active layer, and an upper reflecting layer having a selective oxidized layer are laminated on a substrate; etching the laminated body to form a mesa structure having the selective oxidized layer exposed at side surfaces thereof; selectively oxidizing the selective oxidized layer from the side surfaces of the mesa structure to form a constriction structure in which a current passing region is surrounded by an oxide; forming a separating groove at a position away from the mesa structure; passivating an outermost front surface of at least a part of the laminated body exposed when the separating groove is formed; and coating a passivated part with a dielectric body.
其他摘要	制造表面发射激光器件的制造方法包括形成层叠体的步骤，其中下反射镜，包括有源层的谐振器结构和具有选择性氧化层的上反射层层叠在基板上;蚀刻层叠体以形成台面结构，该台面结构具有在其侧表面处暴露的选择性氧化层;选择性地从台面结构的侧表面氧化选择性氧化层，以形成收缩结构，其中电流通过区域被氧化物包围;在远离台面结构的位置形成分离槽;在形成分离槽时，钝化层叠体的至少一部分的最外表面;用电介质体涂覆钝化部分。
主权项	A surface-emitting laser device comprising: a laminated body in which a lower reflecting mirror, a resonator structure including an active layer, and an upper reflecting mirror having a selective oxidized layer are laminated on a substrate; a light-emitting part composed of a mesa structure formed by grooves for constituting a constriction structure in which a current passing region is surrounded by an oxide obtained by selectively oxidizing side surfaces of the selective oxidized layer; and a separating groove formed at a position away from the mesa structure, wherein an outermost front surface of a side surface of at least a part of the laminated body exposed when the separating groove is formed is passivated.
申请日期	2009-11-12
专利号	US8416822
专利状态	授权
申请号	US13/127531
公开（公告）号	US8416822
IPC 分类号	H01S5/00
专利代理人	-
代理机构	COOPER & DUNHAM LLP
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/45624
专题	半导体激光器专利数据库
作者单位	RICOH COMPANY, LTD.
推荐引用方式 GB/T 7714	SHOUJI, HIROYOSHI,SATO, SHUNICHI,ISHII, TOSHIHIRO,et al. Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus. US8416822[P]. 2013-04-09.

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