Fabrication of scanning III-V compound light emitters integrated with Si-based actuators

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	Fabrication of scanning III-V compound light emitters integrated with Si-based actuators
其他题名	Fabrication of scanning III-V compound light emitters integrated with Si-based actuators
	SUN, DECAI; BRINGANS, ROSS D.; CHUA, CHRISTOPHER L.; FLOYD, PHILIP D.; PEETERS, ERIC; KUBBY, JOEL A.; TRAN, ALEX T.
	2000-04-25
专利权人	XEROX CORPORATION
公开日期	2000-04-25
授权国家	美国
专利类型	授权发明
摘要	A III-V compound light emitter is integrated with Si-based actuators. The Proposed devices take advantage of the superior optical properties of III-V compounds and the superior mechanical properties of Si, as well as mature fabrication technologies of Si-Micro-Electro-Mechanical Systems (MEMS). The emitter can be a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser. Electro or magnetic based actuation from Si-based actuators provides linear or angular movement of the light emitter.
其他摘要	III-V复合光发射器与基于Si的致动器集成在一起。所提出的器件充分利用了III-V族化合物的卓越光学性能和Si的优异机械性能，以及Si-Micro-Electro-Mechanical Systems（MEMS）的成熟制造技术。发射器可以是发光二极管（LED），垂直腔表面发射激光器（VCSEL）或边缘发射激光器。基于Si的致动器的基于电或磁的致动提供光发射器的线性或角度运动。
主权项	A method of making a movable light emitting assembly, comprising: a substrate having a top and a bottom made of semiconductor material, the substrate including a doped layer on the bottom of the substrate, an etch stop layer, a buffer layer, and light source layers and; forming a light source from the light source layers; forming a light source support which movably supports the light source; forming at least one suspension member, each suspension member attached at a first end to the light source support and at a second end to the substrate thereby suspending the light support; and forming at least one force generator which moves the light support.
申请日期	1998-12-11
专利号	US6054335
专利状态	失效
申请号	US09/209866
公开（公告）号	US6054335
IPC 分类号	B81B7/02 \| B81B7/00 \| B81B3/00 \| H01S5/00 \| H01S5/183 \| H01S5/022 \| H01L27/15 \| H01S5/42 \| H01S5/02 \| H01S5/026 \| H01S5/042 \| H01L21/00
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/44742
专题	半导体激光器专利数据库
作者单位	XEROX CORPORATION
推荐引用方式 GB/T 7714	SUN, DECAI,BRINGANS, ROSS D.,CHUA, CHRISTOPHER L.,et al. Fabrication of scanning III-V compound light emitters integrated with Si-based actuators. US6054335[P]. 2000-04-25.

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