Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom

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	Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom
其他题名	Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom
	CARR, DUSTIN WADE; BOGART, GREGORY ROBERT; KEELER, BIANCA E. N.
	2008-03-04
专利权人	NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
公开日期	2008-03-04
授权国家	美国
专利类型	授权发明
摘要	A nanomechanical near-field grating device is disclosed which includes two sub-gratings vertically spaced by a distance less than or equal to an operating wavelength. Each sub-grating includes a plurality of line-elements spaced apart by a distance less than or equal to the operating wavelength. A light source (e.g., a VCSEL or LED) can provide light at the operating wavelength for operation of the device. The device can operate as an active grating, with the intensity of a reflected or transmitted portion of the light varying as the relative positions of the sub-gratings are controlled by an actuator. The device can also operate as a passive grating, with the relative positions of the sub-gratings changing in response to an environmentally-induced force due to acceleration, impact, shock, vibration, gravity, etc. Since the device can be adapted to sense an acceleration that is directed laterally or vertically, a plurality of devices can be located on a common substrate to form a multi-axis acceleration sensor.
其他摘要	公开了一种纳米机械近场光栅器件，其包括垂直间隔小于或等于工作波长的两个子光栅。每个子光栅包括多个线元件，这些线元件间隔开小于或等于工作波长的距离。光源（例如，VCSEL或LED）可以在工作波长下提供光以用于器件的操作。该装置可以作为有源光栅工作，随着子光栅的相对位置由致动器控制，光的反射或透射部分的强度变化。该装置还可以作为无源光栅工作，子光栅的相对位置响应于由于加速，冲击，冲击，振动，重力等引起的环境引起的力而改变。因为该装置可以适应于感测在横向或垂直方向上的加速度，多个装置可以位于公共基板上以形成多轴加速度传感器。
授权日期	2008-03-04
申请日期	2005-03-23
专利号	US7339738
专利状态	授权
申请号	US11/088313
公开（公告）号	US7339738
IPC 分类号	G02B5/18 \| G02B26/08
专利代理人	-
代理机构	HOHIMER, JOHN P.
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/42532
专题	半导体激光器专利数据库
作者单位	NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
推荐引用方式 GB/T 7714	CARR, DUSTIN WADE,BOGART, GREGORY ROBERT,KEELER, BIANCA E. N.. Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom. US7339738[P]. 2008-03-04.

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