Xi'an Institute of Optics and Precision Mechanics,CAS
Semiconductor light emitting device and method for fabricating the same | |
其他题名 | Semiconductor light emitting device and method for fabricating the same |
YOKOGAWA, TOSHIYA; YOSHII, SHIGEO; SASAI, YOICHI | |
1998-10-13 | |
专利权人 | MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
公开日期 | 1998-10-13 |
授权国家 | 美国 |
专利类型 | 授权发明 |
摘要 | In a II-VI group semiconductor laser, on an n type GaAs substrate, an n type ZnSe layer, a multiquantum well layer of a ZnCdSe well layer and a ZnSe barrier layer, and a p type ZnSe layer are deposited in this order. A polycrystalline ZnO layer is provided on both sides of the p type ZnSe layer for constricting current. Multifilm reflecting mirrors, respectively constituted with a polycrystalline SiO2 layer and a polycrystalline TiO2 layer, for obtaining laser oscillation are provided on the p type ZnSe layer as well as on a surface of the n type ZnSe layer exposed by etching the GaAs substrate. Furthermore, a p type AuPd electrode and an n type AuGeNi electrode are respectively provided. Alternatively, on an n type GaAs substrate, an n type ZnSe epitaxial layer, an n type ZnMgSSe cladding layer, an n type ZnSSe optical waveguide layer, a ZnCdSe active layer, a p type ZnSSe optical waveguide layer, a p type ZnMgSSe cladding layer, a p type ZnTe contact layer and a polycrystalline ZnO burying layer are respectively formed. Furthermore, a p type AuPd electrode and an n type In electrode are respectively provided. |
其他摘要 | 在II-VI族半导体激光器中,在n型GaAs衬底上,依次沉积n型ZnSe层,ZnCdSe阱层和ZnSe势垒层的多量子阱层,以及p型ZnSe层。在p型ZnSe层的两侧提供多晶ZnO层以限制电流。在p型ZnSe层上以及通过蚀刻GaAs衬底而暴露的n型ZnSe层的表面上提供用于获得激光振荡的分别由多晶SiO2层和多晶TiO 2层构成的多膜反射镜。此外,分别提供p型AuPd电极和n型AuGeNi电极。或者,在n型GaAs衬底上,n型ZnSe外延层,n型ZnMgSSe覆层,n型ZnSSe光波导层,ZnCdSe有源层,p型ZnSSe光波导层,p型ZnMgSSe覆层,p分别形成ZnTe接触层和多晶ZnO掩埋层。此外,分别提供p型AuPd电极和n型In电极。 |
授权日期 | 1998-10-13 |
申请日期 | 1996-01-22 |
专利号 | US5822347 |
专利状态 | 失效 |
申请号 | US08/589488 |
公开(公告)号 | US5822347 |
IPC 分类号 | H01S5/327 | H01L33/00 | H01S5/347 | H01S5/00 | H01S5/183 | H01S5/20 | H01S5/223 | H01S5/22 | H01L33/10 | H01L33/28 | H01L33/46 | H01S3/19 | H01L29/22 |
专利代理人 | - |
代理机构 | RATNER & PRESTIA |
文献类型 | 专利 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/39391 |
专题 | 半导体激光器专利数据库 |
作者单位 | MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
推荐引用方式 GB/T 7714 | YOKOGAWA, TOSHIYA,YOSHII, SHIGEO,SASAI, YOICHI. Semiconductor light emitting device and method for fabricating the same. US5822347[P]. 1998-10-13. |
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US5822347.PDF(385KB) | 专利 | 开放获取 | CC BY-NC-SA | 请求全文 |
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