Xi'an Institute of Optics and Precision Mechanics,CAS
Light-emitting diode and method for preparing the same | |
其他题名 | Light-emitting diode and method for preparing the same |
XU, JIN; WANG, JIANGBO; LIU, RONG | |
2015-07-21 | |
专利权人 | HC SEMITEK CORPORATION |
公开日期 | 2015-07-21 |
授权国家 | 美国 |
专利类型 | 授权发明 |
摘要 | A method for preparing a light-emitting diode having a vertical structure by stripping a GaN base epitaxial layer and a sapphire substrate by a wet process, the method including: a) preparing a graphical growth substrate; b) growing a GaN base light-emitting diode epitaxial layer on the graphical growth substrate, the GaN base light-emitting diode epitaxial layer from the bottom to the top successively including a N-type GaN layer and a P-type GaN layer; c) successively forming a transparent and electrically conductive film, an omni-directional reflection layer, an electrically conductive reflection layer, and a passive metal protection layer from the bottom to the top on the GaN base light-emitting diode epitaxial layer; and d) removing the first layer of stable material with a high melting point of the growth substrate by dry etching, exposing the N-type GaN layer, and preparing an N electrode on the N-type GaN layer. |
其他摘要 | 一种通过湿法工艺剥离GaN基外延层和蓝宝石衬底制备具有垂直结构的发光二极管的方法,该方法包括:a)制备图形生长衬底; b)在图形生长衬底上生长GaN基发光二极管外延层,从底部到顶部的GaN基发光二极管外延层依次包括N型GaN层和P型GaN层; c)在GaN基发光二极管外延层上从底部到顶部依次形成透明导电膜,全向反射层,导电反射层和无源金属保护层; d)通过干法蚀刻去除生长衬底的高熔点的第一层稳定材料,暴露N型GaN层,并在N型GaN层上制备N电极。 |
授权日期 | 2015-07-21 |
申请日期 | 2014-01-29 |
专利号 | US9087933 |
专利状态 | 授权 |
申请号 | US14/166876 |
公开(公告)号 | US9087933 |
IPC 分类号 | H01L21/00 | H01L33/00 | H01L33/20 | H01L33/60 | H01L33/46 | H01L21/02 |
专利代理人 | SCHOLL, MATTHIAS |
代理机构 | MATTHIAS SCHOLL P.C. |
文献类型 | 专利 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/38641 |
专题 | 半导体激光器专利数据库 |
作者单位 | HC SEMITEK CORPORATION |
推荐引用方式 GB/T 7714 | XU, JIN,WANG, JIANGBO,LIU, RONG. Light-emitting diode and method for preparing the same. US9087933[P]. 2015-07-21. |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
US9087933.PDF(2084KB) | 专利 | 开放获取 | CC BY-NC-SA | 请求全文 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论