| Research on the mechanism of micromachining of CVD diamond by femtosecond laser | |
| Sun, Yu1,2; Dou, Jian1,2; Xu, Muxun1,2; Cui, Jianlei1,2,3; Mei, Xuesong1,2; Wang, Wenjun1,2; Gao, Meng1,2 | |
| 作者部门 | 瞬态光学研究室 |
| 2019-09-10 | |
| 发表期刊 | FERROELECTRICS
 |
| ISSN | 0015-0193;1563-5112 |
| 卷号 | 549期号:1(SI)页码:266-275 |
| 产权排序 | 3 |
| 摘要 | Diamond is an excellent material in terms of hardness, thermal conductivity and chemical stability. In order to broaden its application area, the interaction mechanism of CVD diamond processed by femtosecond laser is analyzed based on laser micromachining technology. Through the threshold theory, the ablation threshold of CVD diamond is calculated. At the same time, the graphitization phase transition occurred in the diamond. The internal elements before and after the ablation of diamond by femtosecond laser are characterized by X-ray energy spectrum analysis. The changes of element content and bonding form are analyzed, and the relevant graphitization mechanism is revealed. |
| 关键词 | Femtosecond laser CVD diamond ablation XPS graphitization |
| DOI | 10.1080/00150193.2019.1592569 |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000494798800030 |
| 出版者 | TAYLOR & FRANCIS LTD |
| EI入藏号 | 20194407602082 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.opt.ac.cn/handle/181661/31917 |
| 专题 | 瞬态光学研究室 |
| 通讯作者 | Cui, Jianlei |
| 作者单位 | 1.Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Shaanxi, Peoples R China 2.Xi An Jiao Tong Univ, Shaanxi Key Lab Intelligent Robots, Xian, Shaanxi, Peoples R China 3.Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian, Shaanxi, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sun, Yu,Dou, Jian,Xu, Muxun,et al. Research on the mechanism of micromachining of CVD diamond by femtosecond laser[J]. FERROELECTRICS,2019,549(1(SI)):266-275. |
| APA | Sun, Yu.,Dou, Jian.,Xu, Muxun.,Cui, Jianlei.,Mei, Xuesong.,...&Gao, Meng.(2019).Research on the mechanism of micromachining of CVD diamond by femtosecond laser.FERROELECTRICS,549(1(SI)),266-275. |
| MLA | Sun, Yu,et al."Research on the mechanism of micromachining of CVD diamond by femtosecond laser".FERROELECTRICS 549.1(SI)(2019):266-275. |
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| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| Research on the mech（1774KB） | 期刊论文 | 作者接受稿 | 限制开放 | CC BY-NC-SA | 请求全文 | |
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