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Fabrication of refractive silicon microlens array with a large focal number and accurate lens profile
Zhou, Xiaojun1; Song, Aiguo1; Wang, Shuai2; Wang, Mengjia3; Yu, Weixing2
作者部门光谱成像技术研究室
2020-04-01
发表期刊MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
ISSN0946-7076;1432-1858
卷号26期号:4页码:1159-1166
产权排序2
摘要

In this paper, we demonstrate the fabrication of refractive silicon microlens array with a large focal number and almost perfect spherical lens shape. Through a modified thermal reflow, photoresist microlens array of a large focal number is fabricated, which is then transferred into the silicon substrate by ion beam milling. To reach an accurate spherical lens profile, we both theoretically and experimentally study the practical factors that harm the pattern transfer fidelity, which mainly include the etching selectivity and faceting effect. Other secondary etching effects, such as the trenching effect and re-deposition effect, are also discussed. Based on these studies, a silicon microlens array with a focal number of 1.35 has been successfully obtained, with the profile error controlled well-below 0.121 mu m, less than lambda/6 within the whole infrared wavelength band. Besides, the fabricated microlens array exhibits a good uniformity and fine surface smoothness. The fabricated silicon microlens arrays can be applied in minatured infrared and terahertz imaging devices, or used as the master mould for soft lithography.

DOI10.1007/s00542-019-04644-4
收录类别SCI ; EI
语种英语
WOS记录号WOS:000489465900001
出版者SPRINGER HEIDELBERG
EI入藏号20195107871414
引用统计
被引频次:6[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/31890
专题光谱成像技术研究室
作者单位1.Southeast Univ, Sch Instrument Sci & Engn, Nanjing 210000, Jiangsu, Peoples R China
2.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Key Lab Spectral Imaging Technol, Xian 710119, Shaanxi, Peoples R China
3.Univ Bourgogne Franche Comte, UMR CNRS 6174, FEMTO ST Inst, 15B Av Montboucons, F-25030 Besancon, France
推荐引用方式
GB/T 7714
Zhou, Xiaojun,Song, Aiguo,Wang, Shuai,et al. Fabrication of refractive silicon microlens array with a large focal number and accurate lens profile[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2020,26(4):1159-1166.
APA Zhou, Xiaojun,Song, Aiguo,Wang, Shuai,Wang, Mengjia,&Yu, Weixing.(2020).Fabrication of refractive silicon microlens array with a large focal number and accurate lens profile.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,26(4),1159-1166.
MLA Zhou, Xiaojun,et al."Fabrication of refractive silicon microlens array with a large focal number and accurate lens profile".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 26.4(2020):1159-1166.
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