High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition

doi:10.1186/s11671-019-2983-1

	High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition
	Cao, Weiwei 1,2,3,4; Zhu, Bingli4 ; Bai, Xiaohong4 ; Xu, Peng4 ; Wang, Bo5 ; Qin, Junjun 5,6; Gou, Yongsheng5 ; Lei, Fanpu 5; Liu, Baiyu1 ; Guo, Junjiang 1,2,3,4; Zhu, Jingping 2,3; Bai, Yonglin1
作者部门	空间科学微光探测技术研究室
	2019-05-06
发表期刊	NANOSCALE RESEARCH LETTERS
ISSN	1931-7573;1556-276X
卷号	14
产权排序	1
摘要	As a key component of electron multiplier device, a microchannel plate (MCP) can be applied in many scientific fields. Pure aluminum oxide (Al2O3) as secondary electron emission (SEE) layer were deposited in the pores of MCP via atomic layer deposition (ALD) to overcome problems such as high dark current and low lifetime which often occur on traditional MCP. In this paper, we systematically investigate the morphology, element distribution, and structure of samples by scanning electron microscopy (SEM) and energy disperse spectroscopy (EDS), respectively. Output current of different thickness of Al2O3 was studied and an optimal thickness was found. Experimental tests show that the average gain of ALD-MCP was nearly five times better than that of traditional MCP, and the ALD-MCP showed better sensitivity and longer lifetime.
关键词	Microchannel plate (MCP) Atomic layer deposition (ALD) Thin film High stability Long lifetime
DOI	10.1186/s11671-019-2983-1
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000467135400001
出版者	SPRINGEROPEN
EI入藏号	20192006915284
引用统计	被引频次：9[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.opt.ac.cn/handle/181661/31407
专题	空间科学微光探测技术研究室
通讯作者	Cao, Weiwei
作者单位	1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Key Lab Ultrafast Photoelect Diagnost Technol, Xian 710119, Shaanxi, Peoples R China 2.Xi An Jiao Tong Univ, Key Lab Phys Elect & Devices, Minist Educ, Xian 710049, Shaanxi, Peoples R China 3.Xi An Jiao Tong Univ, Shaanxi Key Lab Informat Photon Tech, Xian 710049, Shaanxi, Peoples R China 4.Univ Chinese Acad Sci, Beijing 100091, Peoples R China 5.Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian 710119, Shaanxi, Peoples R China 6.Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Shanxi, Peoples R China
推荐引用方式 GB/T 7714	Cao, Weiwei,Zhu, Bingli,Bai, Xiaohong,et al. High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition[J]. NANOSCALE RESEARCH LETTERS,2019,14.
APA	Cao, Weiwei.,Zhu, Bingli.,Bai, Xiaohong.,Xu, Peng.,Wang, Bo.,...&Bai, Yonglin.(2019).High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition.NANOSCALE RESEARCH LETTERS,14.
MLA	Cao, Weiwei,et al."High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition".NANOSCALE RESEARCH LETTERS 14(2019).

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