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High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition
Cao, Weiwei1,2,3,4; Zhu, Bingli4; Bai, Xiaohong4; Xu, Peng4; Wang, Bo5; Qin, Junjun5,6; Gou, Yongsheng5; Lei, Fanpu5; Liu, Baiyu1; Guo, Junjiang1,2,3,4; Zhu, Jingping2,3; Bai, Yonglin1
Department精密物理量测量实验室
2019-05-06
Source PublicationNANOSCALE RESEARCH LETTERS
ISSN1931-7573;1556-276X
Volume14
Contribution Rank1
Abstract

As a key component of electron multiplier device, a microchannel plate (MCP) can be applied in many scientific fields. Pure aluminum oxide (Al2O3) as secondary electron emission (SEE) layer were deposited in the pores of MCP via atomic layer deposition (ALD) to overcome problems such as high dark current and low lifetime which often occur on traditional MCP. In this paper, we systematically investigate the morphology, element distribution, and structure of samples by scanning electron microscopy (SEM) and energy disperse spectroscopy (EDS), respectively. Output current of different thickness of Al2O3 was studied and an optimal thickness was found. Experimental tests show that the average gain of ALD-MCP was nearly five times better than that of traditional MCP, and the ALD-MCP showed better sensitivity and longer lifetime.

KeywordMicrochannel plate (MCP) Atomic layer deposition (ALD) Thin film High stability Long lifetime
DOI10.1186/s11671-019-2983-1
Indexed BySCI ; EI
Language英语
WOS IDWOS:000467135400001
PublisherSPRINGEROPEN
EI Accession Number20192006915284
Citation statistics
Document Type期刊论文
Identifierhttp://ir.opt.ac.cn/handle/181661/31407
Collection精密物理量测量实验室
Corresponding AuthorCao, Weiwei
Affiliation1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Key Lab Ultrafast Photoelect Diagnost Technol, Xian 710119, Shaanxi, Peoples R China
2.Xi An Jiao Tong Univ, Key Lab Phys Elect & Devices, Minist Educ, Xian 710049, Shaanxi, Peoples R China
3.Xi An Jiao Tong Univ, Shaanxi Key Lab Informat Photon Tech, Xian 710049, Shaanxi, Peoples R China
4.Univ Chinese Acad Sci, Beijing 100091, Peoples R China
5.Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian 710119, Shaanxi, Peoples R China
6.Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Shanxi, Peoples R China
Recommended Citation
GB/T 7714
Cao, Weiwei,Zhu, Bingli,Bai, Xiaohong,et al. High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition[J]. NANOSCALE RESEARCH LETTERS,2019,14.
APA Cao, Weiwei.,Zhu, Bingli.,Bai, Xiaohong.,Xu, Peng.,Wang, Bo.,...&Bai, Yonglin.(2019).High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition.NANOSCALE RESEARCH LETTERS,14.
MLA Cao, Weiwei,et al."High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition".NANOSCALE RESEARCH LETTERS 14(2019).
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