Effect of different parameters on machining of SiC/SiC composites via pico-second laser

doi:10.1016/j.apsusc.2015.12.089

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	Effect of different parameters on machining of SiC/SiC composites via pico-second laser
	Li, Weinan1 ; Zhang, Ruoheng1 ; Liu, Yongsheng 2; Wang, Chunhui 2; Wang, Jing 2; Yang, Xiaojun1 ; Cheng, Laifei 2
作者部门	瞬态光学技术国家重点实验室
	2016-02-28
发表期刊	APPLIED SURFACE SCIENCE
ISSN	0169-4332
卷号	364 页码:378-387
产权排序	1
摘要	Pico-second laser plays an important role in modern machining technology, especially in machining high hardness materials. In this article, pico-second laser was utilized for irradiation on SiC/SiC composites, and effects of different processing parameters including the machining modes and laser power were discussed in detail. The results indicated that the machining modes and laser power had great effect on machining of SiC/SiC composites. Different types of surface morphology and structure were observed under helical line scanning and single ring line scanning, and the analysis of their formulation was discussed in detail. It was believed that the machining modes would be responsible to the different shapes of machining results at the same parameters. The processing power shall also influence the surface morphology and quality of machining results. In micro-hole drilling process, large amount of debris and fragments were observed within the micro-holes, and XPS analysis showed that there existed Si-O bonds and Si-C bonds, indicating that the oxidation during processing was incomplete. Other surface morphology, such as pores and pits were discussed as well. (C) 2015 Elsevier B.V. All rights reserved.
文章类型	Article
关键词	Sic/sic Composites X-ray Photoelectron Spectroscopy (Xps) Scanning Electron Microscopy (Sem) Laser Processing
学科领域	数理科学和化学
WOS标题词	Science & Technology ; Physical Sciences ; Technology
DOI	10.1016/j.apsusc.2015.12.089
收录类别	SCI ; EI
关键词[WOS]	C/SIC COMPOSITES ; PICOSECOND LASER ; FEMTOSECOND ; SPEED
语种	英语
WOS研究方向	Chemistry ; Materials Science ; Physics
项目资助者	major national scientific instrument and equipment development project(2011YQ12007504) ; Chinese National Foundation for Natural Sciences(51472201) ; fundamental research funds for the central universities(3102014KYJD011 ; State Key Laboratory of Solidification Processing in NWPU(SKLSP201401 ; Natural Science Foundation of Shaanxi Province(2014JQ6197) ; Shaanxi International cooperation and exchange of scientific projects(2015KW-015) ; 3102015BJ(II)MYZ26) ; KP201504)
WOS类目	Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000369957800050
引用统计	被引频次：80[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.opt.ac.cn/handle/181661/27840
专题	瞬态光学研究室
作者单位	1.Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian 10068, Shaanxi, Peoples R China 2.Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Shaanxi, Peoples R China
推荐引用方式 GB/T 7714	Li, Weinan,Zhang, Ruoheng,Liu, Yongsheng,et al. Effect of different parameters on machining of SiC/SiC composites via pico-second laser[J]. APPLIED SURFACE SCIENCE,2016,364:378-387.
APA	Li, Weinan.,Zhang, Ruoheng.,Liu, Yongsheng.,Wang, Chunhui.,Wang, Jing.,...&Cheng, Laifei.(2016).Effect of different parameters on machining of SiC/SiC composites via pico-second laser.APPLIED SURFACE SCIENCE,364,378-387.
MLA	Li, Weinan,et al."Effect of different parameters on machining of SiC/SiC composites via pico-second laser".APPLIED SURFACE SCIENCE 364(2016):378-387.

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