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Measurement of defocused spot parameters of optical system
其他题名光学系统弥散斑参数的测试
Li, Kun; Chen, Yong-Quan; Zhao, Jian-Ke; Duan, Ya-Xuan; Li, Qiao-Ling; Pan, Liang; Long, Jiang-Bo; Zhang, Hai-Yang
2015-09-01
发表期刊Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号23期号:9页码:2482-2489
摘要Defocused spot parameters of an optical system were measured by a testing system with CCD microscopic imaging quantitatively, and an evaluating method for the defocused spot parameters was designed. Firstly, the definitions of the defocused spot parameters including the diameter and the roundness were given. The connected region shaped by the energy contour of the defocused spots was analyzed, and the diameter equal to the area which is 80% of the total energy of the defocused spots was calculated. Then, the boundary of the region was fitted as an ellipse and the roundness of defocused spot was obtained. The method introduces the ellipse fit into the defocused spot roundness measurement through analysis of the energy distribution of star point image on image plane, so that the effects of CCD noise and stray light in test environment on the measuring results are reduced and the confidence of the test results is improved. The experimental results show that the repeatability of the diameter is 0.18 μm and that of the roundness is 1.65%. The method meets the needs of the optical systems in space projects for the imaging quality control. ©, 2015, Chinese Academy of Sciences. All right reserved.
收录类别EI
语种中文
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/27312
专题检测技术研究中心
推荐引用方式
GB/T 7714
Li, Kun,Chen, Yong-Quan,Zhao, Jian-Ke,et al. Measurement of defocused spot parameters of optical system[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(9):2482-2489.
APA Li, Kun.,Chen, Yong-Quan.,Zhao, Jian-Ke.,Duan, Ya-Xuan.,Li, Qiao-Ling.,...&Zhang, Hai-Yang.(2015).Measurement of defocused spot parameters of optical system.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(9),2482-2489.
MLA Li, Kun,et al."Measurement of defocused spot parameters of optical system".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.9(2015):2482-2489.
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