| Picosecond Laser Machining of Deep Holes in Silicon Infiltrated Silicon Carbide Ceramics | |
Zhang Qing1; Wang Chunhui1; Liu Yongsheng1; Zhang Litong1; Cheng Guanghua2
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| 2015-06-01 | |
| 发表期刊 | JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION
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| 卷号 | 30期号:3页码:437-441 |
| 摘要 | Silicon infiltrated silicon carbide (Si-SiC) ceramics, as high hardness materials, are difficult to machine, especially drilling micro-holes. In this study, the interaction of picosecond laser pulses (1 ps at 1 030 nm) with Si-SiC ceramics was investigated. Variations of the diameter and depth of circular holes with the growth of the laser energy density were obtained. The results indicate that the increase of machining depth follows a nonlinear relation with the increasing of laser energy density, while the diameter has little change with that. Moreover, it is found that some debris and particles are deposited around and inside the holes and waviness is in the entrance and at walls of the holes after laser processing. |
| 文章类型 | Article |
| 关键词 | Picosecond Laser Deep Holes Silicon Infiltrated Silicon Carbide Ceramic |
| WOS标题词 | Science & Technology ; Technology |
| DOI | 10.1007/s11595-015-1167-9 |
| 收录类别 | SCI ; EI |
| 关键词[WOS] | ABLATION ; FEMTOSECOND ; GERMANIUM ; METALS |
| 语种 | 英语 |
| WOS研究方向 | Materials Science |
| WOS类目 | Materials Science, Multidisciplinary |
| WOS记录号 | WOS:000357860000001 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.opt.ac.cn/handle/181661/25254 |
| 专题 | 瞬态光学研究室 |
| 作者单位 | 1.Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Peoples R China 2.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 10068, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang Qing,Wang Chunhui,Liu Yongsheng,et al. Picosecond Laser Machining of Deep Holes in Silicon Infiltrated Silicon Carbide Ceramics[J]. JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION,2015,30(3):437-441. |
| APA | Zhang Qing,Wang Chunhui,Liu Yongsheng,Zhang Litong,&Cheng Guanghua.(2015).Picosecond Laser Machining of Deep Holes in Silicon Infiltrated Silicon Carbide Ceramics.JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION,30(3),437-441. |
| MLA | Zhang Qing,et al."Picosecond Laser Machining of Deep Holes in Silicon Infiltrated Silicon Carbide Ceramics".JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION 30.3(2015):437-441. |
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| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| Picosecond Laser Mac（799KB） | 期刊论文 | 出版稿 | 限制开放 | CC BY-NC-SA | 请求全文 | |
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