| Micromachining features of TiC ceramic by femtosecond pulsed laser | |
Zhang, Ying1; Wang, Yuqian1; Zhang, Junzhan1; Liu, Yongsheng2; Yang, Xiaojun3 ; Zhang, Qing2
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| 2015-06-01 | |
| 发表期刊 | CERAMICS INTERNATIONAL
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| 卷号 | 41期号:5页码:6525-6533 |
| 摘要 | Femtosecond pulsed laser was employed to drill blind holes (or circle surfaces) and through holes in titanium carbide (TiC) ceramic by the helical drilling technique. The effects of spiral number, processing time, laser fluence and repetition rate on the qualities of holes (or circle surfaces) were investigated. Morphology of holes (or circle surfaces) and composition of irradiated areas were analyzed by a scanning electron microscope (SEM), a three-dimensional super depth digital microscope and energy dispersive spectroscopy (EDS), etc. The results indicated that laser fluence and repetition rate had major effects on ablation efficiency and quality. Blind holes with taper bottom were observed when the laser fluence was above 6.37 x 10(-1) J/mm(2). With the increase of laser fluence, hole depth increased firstly and then decreased. The change in hole diameter decreased when the laser fluence was above 0.51 J/mm(2). The effects of repetition rate on hole depth were similar to that of laser fluence, while it showed a faint change in hole diameter at laser fluence of 1.02 J/mm(2) and laser repetition rate ranging from 2 to 140 kHz. Furthermore, through holes were attained at narrowed laser fluence ranging from 0.51 to 1.53 J/mm(2). The drilled holes had good circular geometry for entrance and exit. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved. |
| 文章类型 | Article |
| 关键词 | Titanium Carbide Ceramic Morphology Micromachining |
| WOS标题词 | Science & Technology ; Technology |
| DOI | 10.1016/j.ceramint.2015.01.095 |
| 收录类别 | SCI ; EI |
| 关键词[WOS] | SURFACE INTEGRITY ; COMPOSITES ; SUBSTRATE ; CARBIDE |
| 语种 | 英语 |
| WOS研究方向 | Materials Science |
| WOS类目 | Materials Science, Ceramics |
| WOS记录号 | WOS:000353176300052 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.opt.ac.cn/handle/181661/25048 |
| 专题 | 瞬态光学研究室 |
| 作者单位 | 1.Xian Univ Architecture & Technol, Coll Mat & Mineral Resources, Xian 710055, Shaanxi Provinc, Peoples R China 2.Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Shaanxi Provinc, Peoples R China 3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Ying,Wang, Yuqian,Zhang, Junzhan,et al. Micromachining features of TiC ceramic by femtosecond pulsed laser[J]. CERAMICS INTERNATIONAL,2015,41(5):6525-6533. |
| APA | Zhang, Ying,Wang, Yuqian,Zhang, Junzhan,Liu, Yongsheng,Yang, Xiaojun,&Zhang, Qing.(2015).Micromachining features of TiC ceramic by femtosecond pulsed laser.CERAMICS INTERNATIONAL,41(5),6525-6533. |
| MLA | Zhang, Ying,et al."Micromachining features of TiC ceramic by femtosecond pulsed laser".CERAMICS INTERNATIONAL 41.5(2015):6525-6533. |
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| Micromachining featu（5583KB） | 期刊论文 | 出版稿 | 限制开放 | CC BY | 请求全文 | |
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