| Microstructure and chemical bond evolution of diamond-like carbon films machined by femtosecond laser | |
Wang, Jing1; Wang, Chunhui1; Liu, Yongsheng1; Cheng, Laifei1; Li, Weinan2 ; Zhang, Qing1; Yang, Xiaojun2
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| 2015-06-15 | |
| 发表期刊 | APPLIED SURFACE SCIENCE
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| 卷号 | 340页码:49-55 |
| 摘要 | Femtosecond laser is of great interest for machining high melting point and hardness materials such as diamond like carbon, SiC ceramic, et al. In present work, the microstructural and chemical bond evolution of diamond-like carbon films were investigated using electron microscopy and spectroscopy techniques after machined by diverse femtosecond laser power in air. The results showed the machining depth was essentially proportional to the laser power. The well patterned microgrooves and ripple structures with nanoparticles were formed distinctly in the channels. Considering the D and G Raman band parameters on the laser irradiation, it revealed a conversion from amorphous carbon to nanocrystalline graphite after laser treated with increasing laser power. X-ray photoelectron spectroscopy analysis showed a great decrease of sp(3)/sp(2) after laser treatment. (C) 2015 Elsevier B.V. All rights reserved. |
| 文章类型 | Article |
| 关键词 | Diamond-like Carbon Films Femtosecond Laser Machining Technique Laser Power Microstructure And Chemical Bond |
| WOS标题词 | Science & Technology ; Physical Sciences ; Technology |
| DOI | 10.1016/j.apsusc.2015.02.169 |
| 收录类别 | SCI ; EI |
| 关键词[WOS] | SURFACE-WAVE PLASMA ; HYDROGENATED AMORPHOUS-CARBON ; RESONANT RAMAN-SCATTERING ; THIN-FILMS ; DLC FILMS ; GRAPHITE ; ABLATION ; SPECTROSCOPY ; DEPOSITION ; SPECTRA |
| 语种 | 英语 |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| WOS记录号 | WOS:000352213300007 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.opt.ac.cn/handle/181661/24133 |
| 专题 | 瞬态光学研究室 |
| 作者单位 | 1.Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Peoples R China 2.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 10068, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Jing,Wang, Chunhui,Liu, Yongsheng,et al. Microstructure and chemical bond evolution of diamond-like carbon films machined by femtosecond laser[J]. APPLIED SURFACE SCIENCE,2015,340:49-55. |
| APA | Wang, Jing.,Wang, Chunhui.,Liu, Yongsheng.,Cheng, Laifei.,Li, Weinan.,...&Yang, Xiaojun.(2015).Microstructure and chemical bond evolution of diamond-like carbon films machined by femtosecond laser.APPLIED SURFACE SCIENCE,340,49-55. |
| MLA | Wang, Jing,et al."Microstructure and chemical bond evolution of diamond-like carbon films machined by femtosecond laser".APPLIED SURFACE SCIENCE 340(2015):49-55. |
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| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| Microstructure and c（3089KB） | 期刊论文 | 出版稿 | 限制开放 | CC BY | 请求全文 | |
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