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Machining parameter optimization of C/SiC composites using high power picosecond laser
Zhang, Ruoheng1; Li, Weinan1; Liu, Yongsheng2; Wang, Chunhui2; Wang, Jing2; Yang, Xiaojun1; Cheng, Laifei2
2015-03-01
发表期刊APPLIED SURFACE SCIENCE
卷号330页码:321-331
摘要Picosecond laser is an important machining technology for high hardness materials. In this paper, high power picosecond laser was utilized to drill micro-holes in C/SiC composites, and the effects of different processing parameters including the helical line width and spacing, machining time and scanning speed were discussed. To characterize the qualities of machined holes, scanning electron microscope (SEM) was used to analyze the surface morphology, energy dispersive spectroscopy (EDS) and X-ray photoelectric spectroscopy (XPS) were employed to describe the element composition change between the untreated and laser-treated area. The experimental results indicated that all parameters mentioned above had remarkable effects on the qualities of micro-holes such as shape and depth. Additionally, the debris consisted of C, Si and 0 was observed on the machined surface. The Si C bonds of the SiC matrix transformed into Si-0 bonds after machined. Furthermore, the physical process responsible for the mechanism of debris formation was discussed as well. (C) 2015 Elsevier B.V. All rights reserved.
文章类型Article
关键词Ceramic Matrix Composites X-ray Photoelectron Spectroscopy (Xps) Scanning Electron Microscopy (Sem) Laser Processing
WOS标题词Science & Technology ; Physical Sciences ; Technology
DOI10.1016/j.apsusc.2015.01.010
收录类别SCI ; EI
关键词[WOS]ABLATION ; PULSES ; FEMTOSECOND ; METALS ; PLASMA ; FILMS ; AIR
语种英语
WOS研究方向Chemistry ; Materials Science ; Physics
WOS类目Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS记录号WOS:000349617400040
引用统计
被引频次:59[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/24095
专题瞬态光学研究室
作者单位1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 10068, Shaanxi, Peoples R China
2.Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Shaannxi, Peoples R China
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GB/T 7714
Zhang, Ruoheng,Li, Weinan,Liu, Yongsheng,et al. Machining parameter optimization of C/SiC composites using high power picosecond laser[J]. APPLIED SURFACE SCIENCE,2015,330:321-331.
APA Zhang, Ruoheng.,Li, Weinan.,Liu, Yongsheng.,Wang, Chunhui.,Wang, Jing.,...&Cheng, Laifei.(2015).Machining parameter optimization of C/SiC composites using high power picosecond laser.APPLIED SURFACE SCIENCE,330,321-331.
MLA Zhang, Ruoheng,et al."Machining parameter optimization of C/SiC composites using high power picosecond laser".APPLIED SURFACE SCIENCE 330(2015):321-331.
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