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Study on fabrication and optical properties of Ge-Sb-Se thin films
Zhang Wei1; Chen Yu1; Fu Jing1; Chen Fei-Fei1; Shen Xiang1; Dai Shi-Xun2; Lin Chang-Gui1; Xu Tie-Feng1
2012-03-01
发表期刊ACTA PHYSICA SINICA
卷号61期号:5
摘要Several methods of fabricating chalcogenide thin films are introduced. In this paper, thermal evaporation and radio frequency methods are used to fabricate Ge-Sb-Se thin films. The thicknesses and roughnesses of the films are measured by surface profile-meter. The film growth rates are calculated. The component difference between film and target material is tested by X-ray photoelectron spectroscopy. The third-order optical nonlinearity and the transmission spectra of films fabricated by thermal evaporation are investigated using femto-second Z-scan method and spectrophotometer, to obtain the values of nonlinear refraction, nonlinear absorption and thickness of films. The results show that the films fabricated by thermal evaporation have excellent physical structures and optical properties, and possess promising potential applications in integrated optical devices.
文章类型Article
关键词Chalcogenide Glasses Chalcogenide Thin Films Thermal Evaporation Optical Properties
WOS标题词Science & Technology ; Physical Sciences
收录类别SCI
关键词[WOS]CHALCOGENIDE WAVE-GUIDES ; GLASSES
语种中文
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
WOS记录号WOS:000303170800052
引用统计
被引频次:2[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/24062
专题瞬态光学研究室
作者单位1.Ningbo Univ, Coll Informat Sci & Engn, Ningbo 315211, Zhejiang, Peoples R China
2.CAS, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China
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Zhang Wei,Chen Yu,Fu Jing,et al. Study on fabrication and optical properties of Ge-Sb-Se thin films[J]. ACTA PHYSICA SINICA,2012,61(5).
APA Zhang Wei.,Chen Yu.,Fu Jing.,Chen Fei-Fei.,Shen Xiang.,...&Xu Tie-Feng.(2012).Study on fabrication and optical properties of Ge-Sb-Se thin films.ACTA PHYSICA SINICA,61(5).
MLA Zhang Wei,et al."Study on fabrication and optical properties of Ge-Sb-Se thin films".ACTA PHYSICA SINICA 61.5(2012).
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