Laser wave-front measuring based on quadri-wave lateral shearing interferometry | |
Ren, Juan; Luo, Xiu Juan(罗秀娟); Xia, Ai Li(夏爱利); Zhang, Yu(张羽) | |
2014 | |
会议录名称 | Measurement Technology and its Application III |
页码 | 50-54 |
出版者 | Trans Tech Publications Ltd |
产权排序 | 1 |
摘要 | Quadri-wave lateral shearing interferometry(QWLSI) is a new and powerful technique for wave-front measurement. This paper deduced the principle of QWLSI in details, showed a Fourier analysis of the resulting interferogram, then obtained a wave-front with high accuracy and minimum reconstruction error by using the least square method. Finally a 532nm laser was measured to validate the reconstruction, and the error analysis was discussed in practical laser metrology. It is concluded that QWLSI provides a better choice for the adaptive optics as compared with traditional lateral shearing interferometer(TLSI) and Shack-Hartmann(S-H) wave-front sensor. |
收录类别 | EI |
语种 | 英语 |
ISSN号 | 16609336 |
文献类型 | 会议论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/22570 |
专题 | 光电跟踪与测量技术研究室 |
推荐引用方式 GB/T 7714 | Ren, Juan,Luo, Xiu Juan,Xia, Ai Li,et al. Laser wave-front measuring based on quadri-wave lateral shearing interferometry[C]:Trans Tech Publications Ltd,2014:50-54. |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Laser wave-front mea(400KB) | 会议论文 | 限制开放 | CC BY-NC-SA | 请求全文 |
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